9/11/2011	12:13:55 AM	H2 valve closed
9/11/2011	12:13:55 AM	BCl3 valve closed
9/11/2011	12:13:55 AM	PH3 valve closed
9/11/2011	12:13:55 AM	SiCl4 pre valve closed
9/11/2011	12:13:55 AM	SiCl4 post valve closed
9/11/2011	12:13:55 AM	Main Vac valve closed
9/11/2011	12:13:55 AM	Bypass valve closed
9/11/2011	12:13:55 AM	Bubbler valve closed
9/11/2011	12:13:55 AM	Helium valve opened
9/11/2011	12:13:55 AM	Helium MFC set to  500.000000
9/11/2011	12:13:55 AM	H2 MFC set to  0.000000
9/11/2011	12:13:55 AM	BCl3 MFC set to  0.000000
9/11/2011	12:13:55 AM	PHl3 MFC set to  0.000000
9/11/2011	12:13:55 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:13:55 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:13:55 AM	Tube furnace set to 0
9/11/2011	12:14:01 AM	H2 valve closed
9/11/2011	12:14:01 AM	BCl3 valve closed
9/11/2011	12:14:01 AM	PH3 valve closed
9/11/2011	12:14:01 AM	SiCl4 pre valve closed
9/11/2011	12:14:01 AM	SiCl4 post valve closed
9/11/2011	12:14:01 AM	Main Vac valve closed
9/11/2011	12:14:01 AM	Bypass valve closed
9/11/2011	12:14:01 AM	Helium valve opened
9/11/2011	12:14:01 AM	Bubbler valve opened
9/11/2011	12:14:01 AM	Helium MFC set to  500.000000
9/11/2011	12:14:01 AM	H2 MFC set to  0.000000
9/11/2011	12:14:01 AM	BCl3 MFC set to  0.000000
9/11/2011	12:14:01 AM	PHl3 MFC set to  0.000000
9/11/2011	12:14:01 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:14:01 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:14:01 AM	Tube furnace set to 0
9/11/2011	12:19:01 AM	Helium valve closed
9/11/2011	12:19:01 AM	H2 valve closed
9/11/2011	12:19:01 AM	BCl3 valve closed
9/11/2011	12:19:01 AM	PH3 valve closed
9/11/2011	12:19:01 AM	SiCl4 pre valve closed
9/11/2011	12:19:01 AM	SiCl4 post valve closed
9/11/2011	12:19:01 AM	Main Vac valve closed
9/11/2011	12:19:01 AM	Bypass valve closed
9/11/2011	12:19:01 AM	Bubbler valve closed
9/11/2011	12:19:01 AM	Helium MFC set to  0.000000
9/11/2011	12:19:01 AM	H2 MFC set to  0.000000
9/11/2011	12:19:01 AM	BCl3 MFC set to  0.000000
9/11/2011	12:19:01 AM	PHl3 MFC set to  0.000000
9/11/2011	12:19:01 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:19:01 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:19:01 AM	Tube furnace set to 0
9/11/2011	12:19:02 AM	Helium valve closed
9/11/2011	12:19:02 AM	H2 valve closed
9/11/2011	12:19:02 AM	BCl3 valve closed
9/11/2011	12:19:02 AM	PH3 valve closed
9/11/2011	12:19:02 AM	SiCl4 pre valve closed
9/11/2011	12:19:02 AM	SiCl4 post valve closed
9/11/2011	12:19:02 AM	Main Vac valve closed
9/11/2011	12:19:02 AM	Bubbler valve closed
9/11/2011	12:19:02 AM	Bypass valve opened
9/11/2011	12:19:02 AM	Helium MFC set to  0.000000
9/11/2011	12:19:02 AM	H2 MFC set to  0.000000
9/11/2011	12:19:02 AM	BCl3 MFC set to  0.000000
9/11/2011	12:19:02 AM	PHl3 MFC set to  0.000000
9/11/2011	12:19:02 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:19:02 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:19:02 AM	Tube furnace set to 0
9/11/2011	12:19:53 AM	Helium valve closed
9/11/2011	12:19:53 AM	H2 valve closed
9/11/2011	12:19:53 AM	BCl3 valve closed
9/11/2011	12:19:53 AM	PH3 valve closed
9/11/2011	12:19:53 AM	SiCl4 pre valve closed
9/11/2011	12:19:53 AM	SiCl4 post valve closed
9/11/2011	12:19:53 AM	Main Vac valve closed
9/11/2011	12:19:53 AM	Bubbler valve closed
9/11/2011	12:19:53 AM	Bypass valve opened
9/11/2011	12:19:53 AM	Helium MFC set to  0.000000
9/11/2011	12:19:53 AM	H2 MFC set to  0.000000
9/11/2011	12:19:53 AM	BCl3 MFC set to  0.000000
9/11/2011	12:19:53 AM	PHl3 MFC set to  0.000000
9/11/2011	12:19:53 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:19:53 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:19:53 AM	Tube furnace set to 0
9/11/2011	12:20:53 AM	Helium valve closed
9/11/2011	12:20:53 AM	H2 valve closed
9/11/2011	12:20:53 AM	BCl3 valve closed
9/11/2011	12:20:53 AM	PH3 valve closed
9/11/2011	12:20:53 AM	SiCl4 pre valve closed
9/11/2011	12:20:53 AM	SiCl4 post valve closed
9/11/2011	12:20:53 AM	Bypass valve closed
9/11/2011	12:20:53 AM	Bubbler valve closed
9/11/2011	12:20:53 AM	Main Vac valve opened
9/11/2011	12:20:53 AM	Helium MFC set to  0.000000
9/11/2011	12:20:53 AM	H2 MFC set to  0.000000
9/11/2011	12:20:53 AM	BCl3 MFC set to  0.000000
9/11/2011	12:20:53 AM	PHl3 MFC set to  0.000000
9/11/2011	12:20:53 AM	SiCl4 MFC set to  0.000000
9/11/2011	12:20:53 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	12:20:53 AM	Tube furnace set to 0
9/11/2011	12:20:54 AM	Run finished at 12:20 AM
9/11/2011	1:21:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	1:21:24 AM	Recipe started at 1:21 AM
9/11/2011	1:21:24 AM	Helium valve closed
9/11/2011	1:21:24 AM	H2 valve closed
9/11/2011	1:21:24 AM	BCl3 valve closed
9/11/2011	1:21:24 AM	PH3 valve closed
9/11/2011	1:21:24 AM	SiCl4 pre valve closed
9/11/2011	1:21:24 AM	SiCl4 post valve closed
9/11/2011	1:21:24 AM	Main Vac valve closed
9/11/2011	1:21:24 AM	Bypass valve closed
9/11/2011	1:21:24 AM	Bubbler valve closed
9/11/2011	1:21:24 AM	Helium MFC set to  0.000000
9/11/2011	1:21:24 AM	H2 MFC set to  0.000000
9/11/2011	1:21:24 AM	BCl3 MFC set to  0.000000
9/11/2011	1:21:24 AM	PHl3 MFC set to  0.000000
9/11/2011	1:21:24 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:21:24 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:21:24 AM	Tube furnace set to 0
9/11/2011	1:21:27 AM	H2 valve closed
9/11/2011	1:21:27 AM	BCl3 valve closed
9/11/2011	1:21:27 AM	PH3 valve closed
9/11/2011	1:21:27 AM	SiCl4 pre valve closed
9/11/2011	1:21:27 AM	SiCl4 post valve closed
9/11/2011	1:21:27 AM	Main Vac valve closed
9/11/2011	1:21:27 AM	Bypass valve closed
9/11/2011	1:21:27 AM	Bubbler valve closed
9/11/2011	1:21:27 AM	Helium valve opened
9/11/2011	1:21:27 AM	Helium MFC set to  500.000000
9/11/2011	1:21:27 AM	H2 MFC set to  0.000000
9/11/2011	1:21:27 AM	BCl3 MFC set to  0.000000
9/11/2011	1:21:27 AM	PHl3 MFC set to  0.000000
9/11/2011	1:21:27 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:21:27 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:21:27 AM	Tube furnace set to 0
9/11/2011	1:22:29 AM	Helium valve closed
9/11/2011	1:22:29 AM	H2 valve closed
9/11/2011	1:22:29 AM	BCl3 valve closed
9/11/2011	1:22:29 AM	PH3 valve closed
9/11/2011	1:22:29 AM	SiCl4 pre valve closed
9/11/2011	1:22:29 AM	SiCl4 post valve closed
9/11/2011	1:22:29 AM	Main Vac valve closed
9/11/2011	1:22:29 AM	Bypass valve closed
9/11/2011	1:22:29 AM	Bubbler valve closed
9/11/2011	1:22:29 AM	Helium MFC set to  0.000000
9/11/2011	1:22:29 AM	H2 MFC set to  0.000000
9/11/2011	1:22:29 AM	BCl3 MFC set to  0.000000
9/11/2011	1:22:29 AM	PHl3 MFC set to  0.000000
9/11/2011	1:22:29 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:22:29 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:22:29 AM	Tube furnace set to 0
9/11/2011	1:22:30 AM	Run finished at 1:22 AM
9/11/2011	1:22:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	1:22:37 AM	Helium MFC set to  500.000000
9/11/2011	1:22:38 AM	Helium valve opened
9/11/2011	1:22:42 AM	Bubbler valve opened
9/11/2011	1:27:55 AM	Bubbler valve closed
9/11/2011	1:27:55 AM	Helium valve closed
9/11/2011	1:27:58 AM	Helium MFC set to  0.000000
9/11/2011	1:28:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	1:28:14 AM	Recipe started at 1:28 AM
9/11/2011	1:28:14 AM	Helium valve closed
9/11/2011	1:28:14 AM	H2 valve closed
9/11/2011	1:28:14 AM	BCl3 valve closed
9/11/2011	1:28:14 AM	PH3 valve closed
9/11/2011	1:28:14 AM	SiCl4 pre valve closed
9/11/2011	1:28:14 AM	SiCl4 post valve closed
9/11/2011	1:28:14 AM	Main Vac valve closed
9/11/2011	1:28:14 AM	Bubbler valve closed
9/11/2011	1:28:14 AM	Bypass valve opened
9/11/2011	1:28:14 AM	Helium MFC set to  0.000000
9/11/2011	1:28:14 AM	H2 MFC set to  0.000000
9/11/2011	1:28:14 AM	BCl3 MFC set to  0.000000
9/11/2011	1:28:14 AM	PHl3 MFC set to  0.000000
9/11/2011	1:28:14 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:28:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:28:14 AM	Tube furnace set to 0
9/11/2011	1:29:10 AM	Helium valve closed
9/11/2011	1:29:10 AM	H2 valve closed
9/11/2011	1:29:10 AM	BCl3 valve closed
9/11/2011	1:29:10 AM	PH3 valve closed
9/11/2011	1:29:10 AM	SiCl4 pre valve closed
9/11/2011	1:29:10 AM	SiCl4 post valve closed
9/11/2011	1:29:10 AM	Main Vac valve closed
9/11/2011	1:29:10 AM	Bubbler valve closed
9/11/2011	1:29:10 AM	Bypass valve opened
9/11/2011	1:29:10 AM	Helium MFC set to  0.000000
9/11/2011	1:29:10 AM	H2 MFC set to  0.000000
9/11/2011	1:29:10 AM	BCl3 MFC set to  0.000000
9/11/2011	1:29:10 AM	PHl3 MFC set to  0.000000
9/11/2011	1:29:10 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:29:10 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:29:11 AM	Tube furnace set to 0
9/11/2011	1:29:41 AM	Helium valve closed
9/11/2011	1:29:41 AM	H2 valve closed
9/11/2011	1:29:41 AM	BCl3 valve closed
9/11/2011	1:29:41 AM	PH3 valve closed
9/11/2011	1:29:41 AM	SiCl4 pre valve closed
9/11/2011	1:29:41 AM	SiCl4 post valve closed
9/11/2011	1:29:41 AM	Bypass valve closed
9/11/2011	1:29:41 AM	Bubbler valve closed
9/11/2011	1:29:41 AM	Main Vac valve opened
9/11/2011	1:29:41 AM	Helium MFC set to  0.000000
9/11/2011	1:29:41 AM	H2 MFC set to  0.000000
9/11/2011	1:29:41 AM	BCl3 MFC set to  0.000000
9/11/2011	1:29:41 AM	PHl3 MFC set to  0.000000
9/11/2011	1:29:41 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:29:41 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:29:41 AM	Tube furnace set to 0
9/11/2011	1:30:11 AM	H2 valve closed
9/11/2011	1:30:11 AM	BCl3 valve closed
9/11/2011	1:30:11 AM	PH3 valve closed
9/11/2011	1:30:11 AM	SiCl4 pre valve closed
9/11/2011	1:30:11 AM	SiCl4 post valve closed
9/11/2011	1:30:11 AM	Bypass valve closed
9/11/2011	1:30:11 AM	Bubbler valve closed
9/11/2011	1:30:11 AM	Helium valve opened
9/11/2011	1:30:11 AM	Main Vac valve opened
9/11/2011	1:30:11 AM	Helium MFC set to  20.000000
9/11/2011	1:30:11 AM	H2 MFC set to  0.000000
9/11/2011	1:30:11 AM	BCl3 MFC set to  0.000000
9/11/2011	1:30:11 AM	PHl3 MFC set to  0.000000
9/11/2011	1:30:11 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:30:11 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:30:11 AM	Tube furnace set to 0
9/11/2011	1:30:41 AM	Helium valve closed
9/11/2011	1:30:41 AM	H2 valve closed
9/11/2011	1:30:41 AM	BCl3 valve closed
9/11/2011	1:30:41 AM	PH3 valve closed
9/11/2011	1:30:41 AM	SiCl4 pre valve closed
9/11/2011	1:30:41 AM	SiCl4 post valve closed
9/11/2011	1:30:41 AM	Bypass valve closed
9/11/2011	1:30:41 AM	Bubbler valve closed
9/11/2011	1:30:41 AM	Main Vac valve opened
9/11/2011	1:30:41 AM	Helium MFC set to  0.000000
9/11/2011	1:30:41 AM	H2 MFC set to  0.000000
9/11/2011	1:30:41 AM	BCl3 MFC set to  0.000000
9/11/2011	1:30:41 AM	PHl3 MFC set to  0.000000
9/11/2011	1:30:41 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:30:41 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:30:41 AM	Tube furnace set to 0
9/11/2011	1:31:11 AM	H2 valve closed
9/11/2011	1:31:11 AM	BCl3 valve closed
9/11/2011	1:31:11 AM	PH3 valve closed
9/11/2011	1:31:11 AM	SiCl4 pre valve closed
9/11/2011	1:31:11 AM	SiCl4 post valve closed
9/11/2011	1:31:11 AM	Bypass valve closed
9/11/2011	1:31:11 AM	Bubbler valve closed
9/11/2011	1:31:11 AM	Helium valve opened
9/11/2011	1:31:11 AM	Main Vac valve opened
9/11/2011	1:31:11 AM	Helium MFC set to  20.000000
9/11/2011	1:31:11 AM	H2 MFC set to  0.000000
9/11/2011	1:31:11 AM	BCl3 MFC set to  0.000000
9/11/2011	1:31:11 AM	PHl3 MFC set to  0.000000
9/11/2011	1:31:11 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:31:11 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:31:11 AM	Tube furnace set to 0
9/11/2011	1:31:41 AM	Helium valve closed
9/11/2011	1:31:41 AM	H2 valve closed
9/11/2011	1:31:41 AM	BCl3 valve closed
9/11/2011	1:31:41 AM	PH3 valve closed
9/11/2011	1:31:41 AM	SiCl4 pre valve closed
9/11/2011	1:31:41 AM	SiCl4 post valve closed
9/11/2011	1:31:41 AM	Bypass valve closed
9/11/2011	1:31:41 AM	Bubbler valve closed
9/11/2011	1:31:41 AM	Main Vac valve opened
9/11/2011	1:31:41 AM	Helium MFC set to  0.000000
9/11/2011	1:31:41 AM	H2 MFC set to  0.000000
9/11/2011	1:31:41 AM	BCl3 MFC set to  0.000000
9/11/2011	1:31:41 AM	PHl3 MFC set to  0.000000
9/11/2011	1:31:41 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:31:41 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:31:42 AM	Tube furnace set to 0
9/11/2011	1:32:12 AM	H2 valve closed
9/11/2011	1:32:12 AM	BCl3 valve closed
9/11/2011	1:32:12 AM	PH3 valve closed
9/11/2011	1:32:12 AM	SiCl4 pre valve closed
9/11/2011	1:32:12 AM	SiCl4 post valve closed
9/11/2011	1:32:12 AM	Bypass valve closed
9/11/2011	1:32:12 AM	Bubbler valve closed
9/11/2011	1:32:12 AM	Helium valve opened
9/11/2011	1:32:12 AM	Main Vac valve opened
9/11/2011	1:32:12 AM	Helium MFC set to  20.000000
9/11/2011	1:32:12 AM	H2 MFC set to  0.000000
9/11/2011	1:32:12 AM	BCl3 MFC set to  0.000000
9/11/2011	1:32:12 AM	PHl3 MFC set to  0.000000
9/11/2011	1:32:12 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:32:12 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:32:12 AM	Tube furnace set to 0
9/11/2011	1:32:42 AM	Helium valve closed
9/11/2011	1:32:42 AM	H2 valve closed
9/11/2011	1:32:42 AM	BCl3 valve closed
9/11/2011	1:32:42 AM	PH3 valve closed
9/11/2011	1:32:42 AM	SiCl4 pre valve closed
9/11/2011	1:32:42 AM	SiCl4 post valve closed
9/11/2011	1:32:42 AM	Bypass valve closed
9/11/2011	1:32:42 AM	Bubbler valve closed
9/11/2011	1:32:42 AM	Main Vac valve opened
9/11/2011	1:32:42 AM	Helium MFC set to  0.000000
9/11/2011	1:32:42 AM	H2 MFC set to  0.000000
9/11/2011	1:32:42 AM	BCl3 MFC set to  0.000000
9/11/2011	1:32:42 AM	PHl3 MFC set to  0.000000
9/11/2011	1:32:42 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:32:42 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:32:42 AM	Tube furnace set to 0
9/11/2011	1:32:54 AM	Run aborted at 1:32 AM
9/11/2011	1:32:54 AM	Helium valve closed
9/11/2011	1:32:54 AM	H2 valve closed
9/11/2011	1:32:54 AM	BCl3 valve closed
9/11/2011	1:32:54 AM	PH3 valve closed
9/11/2011	1:32:54 AM	SiCl4 pre valve closed
9/11/2011	1:32:54 AM	SiCl4 post valve closed
9/11/2011	1:32:54 AM	Bypass valve closed
9/11/2011	1:32:54 AM	Main Vac valve closed
9/11/2011	1:32:54 AM	Bubbler valve closed
9/11/2011	1:32:54 AM	Helium MFC set to  0.000000
9/11/2011	1:32:54 AM	H2 MFC set to  0.000000
9/11/2011	1:32:54 AM	BCl3 MFC set to  0.000000
9/11/2011	1:32:54 AM	PHl3 MFC set to  0.000000
9/11/2011	1:32:54 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:32:54 AM	Tube furnace set to 0
9/11/2011	1:32:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	1:32:57 AM	Main Vac valve opened
9/11/2011	1:36:43 AM	Recipe started at 1:36 AM
9/11/2011	1:36:43 AM	Helium valve closed
9/11/2011	1:36:43 AM	H2 valve closed
9/11/2011	1:36:43 AM	BCl3 valve closed
9/11/2011	1:36:43 AM	PH3 valve closed
9/11/2011	1:36:43 AM	SiCl4 pre valve closed
9/11/2011	1:36:43 AM	SiCl4 post valve closed
9/11/2011	1:36:43 AM	Bypass valve closed
9/11/2011	1:36:43 AM	Bubbler valve closed
9/11/2011	1:36:43 AM	Main Vac valve opened
9/11/2011	1:36:43 AM	Helium MFC set to  0.000000
9/11/2011	1:36:43 AM	H2 MFC set to  0.000000
9/11/2011	1:36:43 AM	BCl3 MFC set to  0.000000
9/11/2011	1:36:43 AM	PHl3 MFC set to  0.000000
9/11/2011	1:36:43 AM	SiCl4 MFC set to  0.000000
9/11/2011	1:36:43 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	1:36:43 AM	Tube furnace set to 180
9/11/2011	2:56:43 AM	H2 valve closed
9/11/2011	2:56:43 AM	BCl3 valve closed
9/11/2011	2:56:43 AM	PH3 valve closed
9/11/2011	2:56:43 AM	SiCl4 pre valve closed
9/11/2011	2:56:43 AM	SiCl4 post valve closed
9/11/2011	2:56:43 AM	Bypass valve closed
9/11/2011	2:56:43 AM	Bubbler valve closed
9/11/2011	2:56:43 AM	Helium valve opened
9/11/2011	2:56:43 AM	Main Vac valve opened
9/11/2011	2:56:43 AM	Helium MFC set to  10.000000
9/11/2011	2:56:43 AM	H2 MFC set to  0.000000
9/11/2011	2:56:43 AM	BCl3 MFC set to  0.000000
9/11/2011	2:56:43 AM	PHl3 MFC set to  0.000000
9/11/2011	2:56:43 AM	SiCl4 MFC set to  0.000000
9/11/2011	2:56:43 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	2:56:43 AM	Tube furnace set to 180
9/11/2011	2:57:13 AM	Helium valve closed
9/11/2011	2:57:13 AM	H2 valve closed
9/11/2011	2:57:13 AM	BCl3 valve closed
9/11/2011	2:57:13 AM	PH3 valve closed
9/11/2011	2:57:13 AM	SiCl4 pre valve closed
9/11/2011	2:57:13 AM	SiCl4 post valve closed
9/11/2011	2:57:13 AM	Bypass valve closed
9/11/2011	2:57:13 AM	Bubbler valve closed
9/11/2011	2:57:13 AM	Main Vac valve opened
9/11/2011	2:57:13 AM	Helium MFC set to  0.000000
9/11/2011	2:57:13 AM	H2 MFC set to  0.000000
9/11/2011	2:57:13 AM	BCl3 MFC set to  0.000000
9/11/2011	2:57:13 AM	PHl3 MFC set to  0.000000
9/11/2011	2:57:13 AM	SiCl4 MFC set to  0.000000
9/11/2011	2:57:13 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	2:57:13 AM	Tube furnace set to 180
9/11/2011	2:57:43 AM	H2 valve closed
9/11/2011	2:57:43 AM	BCl3 valve closed
9/11/2011	2:57:43 AM	PH3 valve closed
9/11/2011	2:57:43 AM	SiCl4 pre valve closed
9/11/2011	2:57:44 AM	SiCl4 post valve closed
9/11/2011	2:57:44 AM	Bypass valve closed
9/11/2011	2:57:44 AM	Bubbler valve closed
9/11/2011	2:57:44 AM	Helium valve opened
9/11/2011	2:57:44 AM	Main Vac valve opened
9/11/2011	2:57:44 AM	Helium MFC set to  10.000000
9/11/2011	2:57:44 AM	H2 MFC set to  0.000000
9/11/2011	2:57:44 AM	BCl3 MFC set to  0.000000
9/11/2011	2:57:44 AM	PHl3 MFC set to  0.000000
9/11/2011	2:57:44 AM	SiCl4 MFC set to  0.000000
9/11/2011	2:57:44 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	2:57:44 AM	Tube furnace set to 180
9/11/2011	2:58:14 AM	Helium valve closed
9/11/2011	2:58:14 AM	H2 valve closed
9/11/2011	2:58:14 AM	BCl3 valve closed
9/11/2011	2:58:14 AM	PH3 valve closed
9/11/2011	2:58:14 AM	SiCl4 pre valve closed
9/11/2011	2:58:14 AM	SiCl4 post valve closed
9/11/2011	2:58:14 AM	Bypass valve closed
9/11/2011	2:58:14 AM	Bubbler valve closed
9/11/2011	2:58:14 AM	Main Vac valve opened
9/11/2011	2:58:14 AM	Helium MFC set to  0.000000
9/11/2011	2:58:14 AM	H2 MFC set to  0.000000
9/11/2011	2:58:14 AM	BCl3 MFC set to  0.000000
9/11/2011	2:58:14 AM	PHl3 MFC set to  0.000000
9/11/2011	2:58:14 AM	SiCl4 MFC set to  0.000000
9/11/2011	2:58:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	2:58:14 AM	Tube furnace set to 180
9/11/2011	3:00:14 AM	Helium valve closed
9/11/2011	3:00:14 AM	BCl3 valve closed
9/11/2011	3:00:14 AM	PH3 valve closed
9/11/2011	3:00:14 AM	SiCl4 pre valve closed
9/11/2011	3:00:14 AM	SiCl4 post valve closed
9/11/2011	3:00:14 AM	Main Vac valve closed
9/11/2011	3:00:14 AM	Bypass valve closed
9/11/2011	3:00:14 AM	Bubbler valve closed
9/11/2011	3:00:14 AM	H2 valve opened
9/11/2011	3:00:14 AM	Helium MFC set to  0.000000
9/11/2011	3:00:14 AM	H2 MFC set to  500.000000
9/11/2011	3:00:14 AM	BCl3 MFC set to  0.000000
9/11/2011	3:00:14 AM	PHl3 MFC set to  0.000000
9/11/2011	3:00:14 AM	SiCl4 MFC set to  0.000000
9/11/2011	3:00:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:00:14 AM	Tube furnace set to 1000
9/11/2011	3:01:18 AM	Helium valve closed
9/11/2011	3:01:18 AM	BCl3 valve closed
9/11/2011	3:01:18 AM	PH3 valve closed
9/11/2011	3:01:18 AM	SiCl4 pre valve closed
9/11/2011	3:01:18 AM	SiCl4 post valve closed
9/11/2011	3:01:18 AM	Main Vac valve closed
9/11/2011	3:01:18 AM	Bypass valve closed
9/11/2011	3:01:18 AM	H2 valve opened
9/11/2011	3:01:18 AM	Bubbler valve opened
9/11/2011	3:01:18 AM	Helium MFC set to  0.000000
9/11/2011	3:01:18 AM	H2 MFC set to  500.000000
9/11/2011	3:01:18 AM	BCl3 MFC set to  0.000000
9/11/2011	3:01:18 AM	PHl3 MFC set to  0.000000
9/11/2011	3:01:18 AM	SiCl4 MFC set to  0.000000
9/11/2011	3:01:18 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:01:18 AM	Tube furnace set to 1000
9/11/2011	3:01:19 AM	Helium valve closed
9/11/2011	3:01:19 AM	BCl3 valve closed
9/11/2011	3:01:19 AM	PH3 valve closed
9/11/2011	3:01:19 AM	SiCl4 pre valve closed
9/11/2011	3:01:19 AM	SiCl4 post valve closed
9/11/2011	3:01:19 AM	Main Vac valve closed
9/11/2011	3:01:19 AM	Bypass valve closed
9/11/2011	3:01:19 AM	H2 valve opened
9/11/2011	3:01:19 AM	Bubbler valve opened
9/11/2011	3:01:19 AM	Helium MFC set to  0.000000
9/11/2011	3:01:19 AM	H2 MFC set to  500.000000
9/11/2011	3:01:19 AM	BCl3 MFC set to  0.000000
9/11/2011	3:01:19 AM	PHl3 MFC set to  0.000000
9/11/2011	3:01:19 AM	SiCl4 MFC set to  0.000000
9/11/2011	3:01:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:01:19 AM	Tube furnace set to 1000
9/11/2011	3:21:19 AM	Helium valve closed
9/11/2011	3:21:19 AM	PH3 valve closed
9/11/2011	3:21:19 AM	Main Vac valve closed
9/11/2011	3:21:19 AM	Bypass valve closed
9/11/2011	3:21:19 AM	H2 valve opened
9/11/2011	3:21:19 AM	BCl3 valve opened
9/11/2011	3:21:19 AM	SiCl4 pre valve opened
9/11/2011	3:21:19 AM	SiCl4 post valve opened
9/11/2011	3:21:19 AM	Bubbler valve opened
9/11/2011	3:21:19 AM	Helium MFC set to  0.000000
9/11/2011	3:21:19 AM	H2 MFC set to  500.000000
9/11/2011	3:21:19 AM	BCl3 MFC set to  2.000000
9/11/2011	3:21:19 AM	PHl3 MFC set to  0.000000
9/11/2011	3:21:19 AM	SiCl4 MFC set to  50.000000
9/11/2011	3:21:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:21:19 AM	Tube furnace set to 1000
9/11/2011	3:35:19 AM	Helium valve closed
9/11/2011	3:35:19 AM	BCl3 valve closed
9/11/2011	3:35:19 AM	PH3 valve closed
9/11/2011	3:35:19 AM	SiCl4 pre valve closed
9/11/2011	3:35:19 AM	SiCl4 post valve closed
9/11/2011	3:35:19 AM	Main Vac valve closed
9/11/2011	3:35:19 AM	Bypass valve closed
9/11/2011	3:35:19 AM	H2 valve opened
9/11/2011	3:35:19 AM	Bubbler valve opened
9/11/2011	3:35:19 AM	Helium MFC set to  0.000000
9/11/2011	3:35:19 AM	H2 MFC set to  500.000000
9/11/2011	3:35:19 AM	BCl3 MFC set to  0.000000
9/11/2011	3:35:19 AM	PHl3 MFC set to  0.000000
9/11/2011	3:35:19 AM	SiCl4 MFC set to  0.000000
9/11/2011	3:35:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:35:19 AM	Tube furnace set to 750
9/11/2011	3:40:19 AM	H2 valve closed
9/11/2011	3:40:19 AM	BCl3 valve closed
9/11/2011	3:40:19 AM	PH3 valve closed
9/11/2011	3:40:19 AM	SiCl4 pre valve closed
9/11/2011	3:40:19 AM	SiCl4 post valve closed
9/11/2011	3:40:19 AM	Main Vac valve closed
9/11/2011	3:40:19 AM	Bypass valve closed
9/11/2011	3:40:19 AM	Helium valve opened
9/11/2011	3:40:19 AM	Bubbler valve opened
9/11/2011	3:40:19 AM	Helium MFC set to  500.000000
9/11/2011	3:40:19 AM	H2 MFC set to  0.000000
9/11/2011	3:40:19 AM	BCl3 MFC set to  0.000000
9/11/2011	3:40:19 AM	PHl3 MFC set to  0.000000
9/11/2011	3:40:19 AM	SiCl4 MFC set to  0.000000
9/11/2011	3:40:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	3:40:19 AM	Tube furnace set to 0
9/11/2011	4:00:19 AM	Helium valve closed
9/11/2011	4:00:19 AM	H2 valve closed
9/11/2011	4:00:19 AM	BCl3 valve closed
9/11/2011	4:00:19 AM	PH3 valve closed
9/11/2011	4:00:19 AM	SiCl4 pre valve closed
9/11/2011	4:00:19 AM	SiCl4 post valve closed
9/11/2011	4:00:19 AM	Main Vac valve closed
9/11/2011	4:00:19 AM	Bypass valve closed
9/11/2011	4:00:19 AM	Bubbler valve closed
9/11/2011	4:00:19 AM	Helium MFC set to  0.000000
9/11/2011	4:00:19 AM	H2 MFC set to  0.000000
9/11/2011	4:00:19 AM	BCl3 MFC set to  0.000000
9/11/2011	4:00:19 AM	PHl3 MFC set to  0.000000
9/11/2011	4:00:19 AM	SiCl4 MFC set to  0.000000
9/11/2011	4:00:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:00:20 AM	Tube furnace set to 0
9/11/2011	5:00:20 AM	H2 valve closed
9/11/2011	5:00:20 AM	BCl3 valve closed
9/11/2011	5:00:20 AM	PH3 valve closed
9/11/2011	5:00:20 AM	SiCl4 pre valve closed
9/11/2011	5:00:20 AM	SiCl4 post valve closed
9/11/2011	5:00:20 AM	Main Vac valve closed
9/11/2011	5:00:20 AM	Bypass valve closed
9/11/2011	5:00:20 AM	Bubbler valve closed
9/11/2011	5:00:20 AM	Helium valve opened
9/11/2011	5:00:20 AM	Helium MFC set to  500.000000
9/11/2011	5:00:20 AM	H2 MFC set to  0.000000
9/11/2011	5:00:20 AM	BCl3 MFC set to  0.000000
9/11/2011	5:00:20 AM	PHl3 MFC set to  0.000000
9/11/2011	5:00:20 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:00:20 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:00:20 AM	Tube furnace set to 0
9/11/2011	5:00:25 AM	H2 valve closed
9/11/2011	5:00:25 AM	BCl3 valve closed
9/11/2011	5:00:25 AM	PH3 valve closed
9/11/2011	5:00:25 AM	SiCl4 pre valve closed
9/11/2011	5:00:25 AM	SiCl4 post valve closed
9/11/2011	5:00:25 AM	Main Vac valve closed
9/11/2011	5:00:25 AM	Bypass valve closed
9/11/2011	5:00:25 AM	Helium valve opened
9/11/2011	5:00:25 AM	Bubbler valve opened
9/11/2011	5:00:25 AM	Helium MFC set to  500.000000
9/11/2011	5:00:25 AM	H2 MFC set to  0.000000
9/11/2011	5:00:25 AM	BCl3 MFC set to  0.000000
9/11/2011	5:00:25 AM	PHl3 MFC set to  0.000000
9/11/2011	5:00:25 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:00:25 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:00:26 AM	Tube furnace set to 0
9/11/2011	5:05:26 AM	Helium valve closed
9/11/2011	5:05:26 AM	H2 valve closed
9/11/2011	5:05:26 AM	BCl3 valve closed
9/11/2011	5:05:26 AM	PH3 valve closed
9/11/2011	5:05:26 AM	SiCl4 pre valve closed
9/11/2011	5:05:26 AM	SiCl4 post valve closed
9/11/2011	5:05:26 AM	Main Vac valve closed
9/11/2011	5:05:26 AM	Bypass valve closed
9/11/2011	5:05:26 AM	Bubbler valve closed
9/11/2011	5:05:26 AM	Helium MFC set to  0.000000
9/11/2011	5:05:26 AM	H2 MFC set to  0.000000
9/11/2011	5:05:26 AM	BCl3 MFC set to  0.000000
9/11/2011	5:05:26 AM	PHl3 MFC set to  0.000000
9/11/2011	5:05:26 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:05:26 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:05:26 AM	Tube furnace set to 0
9/11/2011	5:05:27 AM	Helium valve closed
9/11/2011	5:05:27 AM	H2 valve closed
9/11/2011	5:05:27 AM	BCl3 valve closed
9/11/2011	5:05:27 AM	PH3 valve closed
9/11/2011	5:05:27 AM	SiCl4 pre valve closed
9/11/2011	5:05:27 AM	SiCl4 post valve closed
9/11/2011	5:05:27 AM	Main Vac valve closed
9/11/2011	5:05:27 AM	Bubbler valve closed
9/11/2011	5:05:27 AM	Bypass valve opened
9/11/2011	5:05:27 AM	Helium MFC set to  0.000000
9/11/2011	5:05:27 AM	H2 MFC set to  0.000000
9/11/2011	5:05:27 AM	BCl3 MFC set to  0.000000
9/11/2011	5:05:27 AM	PHl3 MFC set to  0.000000
9/11/2011	5:05:27 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:05:27 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:05:27 AM	Tube furnace set to 0
9/11/2011	5:06:14 AM	Helium valve closed
9/11/2011	5:06:14 AM	H2 valve closed
9/11/2011	5:06:14 AM	BCl3 valve closed
9/11/2011	5:06:14 AM	PH3 valve closed
9/11/2011	5:06:14 AM	SiCl4 pre valve closed
9/11/2011	5:06:14 AM	SiCl4 post valve closed
9/11/2011	5:06:14 AM	Main Vac valve closed
9/11/2011	5:06:14 AM	Bubbler valve closed
9/11/2011	5:06:14 AM	Bypass valve opened
9/11/2011	5:06:14 AM	Helium MFC set to  0.000000
9/11/2011	5:06:14 AM	H2 MFC set to  0.000000
9/11/2011	5:06:14 AM	BCl3 MFC set to  0.000000
9/11/2011	5:06:14 AM	PHl3 MFC set to  0.000000
9/11/2011	5:06:14 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:06:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:06:14 AM	Tube furnace set to 0
9/11/2011	5:07:14 AM	Helium valve closed
9/11/2011	5:07:14 AM	H2 valve closed
9/11/2011	5:07:14 AM	BCl3 valve closed
9/11/2011	5:07:14 AM	PH3 valve closed
9/11/2011	5:07:14 AM	SiCl4 pre valve closed
9/11/2011	5:07:14 AM	SiCl4 post valve closed
9/11/2011	5:07:14 AM	Bypass valve closed
9/11/2011	5:07:14 AM	Bubbler valve closed
9/11/2011	5:07:14 AM	Main Vac valve opened
9/11/2011	5:07:14 AM	Helium MFC set to  0.000000
9/11/2011	5:07:14 AM	H2 MFC set to  0.000000
9/11/2011	5:07:14 AM	BCl3 MFC set to  0.000000
9/11/2011	5:07:14 AM	PHl3 MFC set to  0.000000
9/11/2011	5:07:14 AM	SiCl4 MFC set to  0.000000
9/11/2011	5:07:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:07:15 AM	Tube furnace set to 0
9/11/2011	5:07:16 AM	Run finished at 5:07 AM
9/11/2011	4:47:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	4:47:31 PM	Recipe started at 4:47 PM
9/11/2011	4:47:31 PM	Helium valve closed
9/11/2011	4:47:31 PM	H2 valve closed
9/11/2011	4:47:31 PM	BCl3 valve closed
9/11/2011	4:47:31 PM	PH3 valve closed
9/11/2011	4:47:31 PM	SiCl4 pre valve closed
9/11/2011	4:47:31 PM	SiCl4 post valve closed
9/11/2011	4:47:31 PM	Main Vac valve closed
9/11/2011	4:47:31 PM	Bypass valve closed
9/11/2011	4:47:31 PM	Bubbler valve closed
9/11/2011	4:47:31 PM	Helium MFC set to  0.000000
9/11/2011	4:47:31 PM	H2 MFC set to  0.000000
9/11/2011	4:47:31 PM	BCl3 MFC set to  0.000000
9/11/2011	4:47:31 PM	PHl3 MFC set to  0.000000
9/11/2011	4:47:31 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:47:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:47:31 PM	Tube furnace set to 0
9/11/2011	4:47:34 PM	H2 valve closed
9/11/2011	4:47:34 PM	BCl3 valve closed
9/11/2011	4:47:34 PM	PH3 valve closed
9/11/2011	4:47:34 PM	SiCl4 pre valve closed
9/11/2011	4:47:34 PM	SiCl4 post valve closed
9/11/2011	4:47:34 PM	Main Vac valve closed
9/11/2011	4:47:34 PM	Bypass valve closed
9/11/2011	4:47:34 PM	Bubbler valve closed
9/11/2011	4:47:34 PM	Helium valve opened
9/11/2011	4:47:34 PM	Helium MFC set to  500.000000
9/11/2011	4:47:34 PM	H2 MFC set to  0.000000
9/11/2011	4:47:34 PM	BCl3 MFC set to  0.000000
9/11/2011	4:47:34 PM	PHl3 MFC set to  0.000000
9/11/2011	4:47:34 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:47:34 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:47:34 PM	Tube furnace set to 0
9/11/2011	4:48:39 PM	Helium valve closed
9/11/2011	4:48:39 PM	H2 valve closed
9/11/2011	4:48:39 PM	BCl3 valve closed
9/11/2011	4:48:39 PM	PH3 valve closed
9/11/2011	4:48:39 PM	SiCl4 pre valve closed
9/11/2011	4:48:39 PM	SiCl4 post valve closed
9/11/2011	4:48:39 PM	Main Vac valve closed
9/11/2011	4:48:39 PM	Bypass valve closed
9/11/2011	4:48:39 PM	Bubbler valve closed
9/11/2011	4:48:39 PM	Helium MFC set to  0.000000
9/11/2011	4:48:39 PM	H2 MFC set to  0.000000
9/11/2011	4:48:39 PM	BCl3 MFC set to  0.000000
9/11/2011	4:48:39 PM	PHl3 MFC set to  0.000000
9/11/2011	4:48:39 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:48:39 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:48:40 PM	Tube furnace set to 0
9/11/2011	4:48:41 PM	Run finished at 4:48 PM
9/11/2011	4:48:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	4:48:51 PM	Helium MFC set to  500.000000
9/11/2011	4:48:52 PM	Helium valve opened
9/11/2011	4:48:56 PM	Bubbler valve opened
9/11/2011	4:53:34 PM	Bubbler valve closed
9/11/2011	4:53:34 PM	Helium valve closed
9/11/2011	4:53:37 PM	Helium MFC set to  0.000000
9/11/2011	4:53:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	4:53:52 PM	Recipe started at 4:53 PM
9/11/2011	4:53:52 PM	Helium valve closed
9/11/2011	4:53:52 PM	H2 valve closed
9/11/2011	4:53:52 PM	BCl3 valve closed
9/11/2011	4:53:52 PM	PH3 valve closed
9/11/2011	4:53:52 PM	SiCl4 pre valve closed
9/11/2011	4:53:52 PM	SiCl4 post valve closed
9/11/2011	4:53:52 PM	Main Vac valve closed
9/11/2011	4:53:52 PM	Bubbler valve closed
9/11/2011	4:53:52 PM	Bypass valve opened
9/11/2011	4:53:52 PM	Helium MFC set to  0.000000
9/11/2011	4:53:52 PM	H2 MFC set to  0.000000
9/11/2011	4:53:52 PM	BCl3 MFC set to  0.000000
9/11/2011	4:53:52 PM	PHl3 MFC set to  0.000000
9/11/2011	4:53:52 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:53:52 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:53:53 PM	Tube furnace set to 0
9/11/2011	4:54:52 PM	Helium valve closed
9/11/2011	4:54:52 PM	H2 valve closed
9/11/2011	4:54:52 PM	BCl3 valve closed
9/11/2011	4:54:52 PM	PH3 valve closed
9/11/2011	4:54:52 PM	SiCl4 pre valve closed
9/11/2011	4:54:52 PM	SiCl4 post valve closed
9/11/2011	4:54:52 PM	Main Vac valve closed
9/11/2011	4:54:52 PM	Bubbler valve closed
9/11/2011	4:54:52 PM	Bypass valve opened
9/11/2011	4:54:52 PM	Helium MFC set to  0.000000
9/11/2011	4:54:52 PM	H2 MFC set to  0.000000
9/11/2011	4:54:52 PM	BCl3 MFC set to  0.000000
9/11/2011	4:54:52 PM	PHl3 MFC set to  0.000000
9/11/2011	4:54:52 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:54:52 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:54:52 PM	Tube furnace set to 0
9/11/2011	4:55:22 PM	Helium valve closed
9/11/2011	4:55:22 PM	H2 valve closed
9/11/2011	4:55:22 PM	BCl3 valve closed
9/11/2011	4:55:22 PM	PH3 valve closed
9/11/2011	4:55:22 PM	SiCl4 pre valve closed
9/11/2011	4:55:22 PM	SiCl4 post valve closed
9/11/2011	4:55:22 PM	Bypass valve closed
9/11/2011	4:55:22 PM	Bubbler valve closed
9/11/2011	4:55:22 PM	Main Vac valve opened
9/11/2011	4:55:22 PM	Helium MFC set to  0.000000
9/11/2011	4:55:22 PM	H2 MFC set to  0.000000
9/11/2011	4:55:22 PM	BCl3 MFC set to  0.000000
9/11/2011	4:55:22 PM	PHl3 MFC set to  0.000000
9/11/2011	4:55:22 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:55:22 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:55:22 PM	Tube furnace set to 0
9/11/2011	4:55:52 PM	H2 valve closed
9/11/2011	4:55:52 PM	BCl3 valve closed
9/11/2011	4:55:52 PM	PH3 valve closed
9/11/2011	4:55:52 PM	SiCl4 pre valve closed
9/11/2011	4:55:52 PM	SiCl4 post valve closed
9/11/2011	4:55:52 PM	Bypass valve closed
9/11/2011	4:55:52 PM	Bubbler valve closed
9/11/2011	4:55:53 PM	Helium valve opened
9/11/2011	4:55:53 PM	Main Vac valve opened
9/11/2011	4:55:53 PM	Helium MFC set to  20.000000
9/11/2011	4:55:53 PM	H2 MFC set to  0.000000
9/11/2011	4:55:53 PM	BCl3 MFC set to  0.000000
9/11/2011	4:55:53 PM	PHl3 MFC set to  0.000000
9/11/2011	4:55:53 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:55:53 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:55:53 PM	Tube furnace set to 0
9/11/2011	4:56:23 PM	Helium valve closed
9/11/2011	4:56:23 PM	H2 valve closed
9/11/2011	4:56:23 PM	BCl3 valve closed
9/11/2011	4:56:23 PM	PH3 valve closed
9/11/2011	4:56:23 PM	SiCl4 pre valve closed
9/11/2011	4:56:23 PM	SiCl4 post valve closed
9/11/2011	4:56:23 PM	Bypass valve closed
9/11/2011	4:56:23 PM	Bubbler valve closed
9/11/2011	4:56:23 PM	Main Vac valve opened
9/11/2011	4:56:23 PM	Helium MFC set to  0.000000
9/11/2011	4:56:23 PM	H2 MFC set to  0.000000
9/11/2011	4:56:23 PM	BCl3 MFC set to  0.000000
9/11/2011	4:56:23 PM	PHl3 MFC set to  0.000000
9/11/2011	4:56:23 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:56:23 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:56:23 PM	Tube furnace set to 0
9/11/2011	4:56:53 PM	H2 valve closed
9/11/2011	4:56:53 PM	BCl3 valve closed
9/11/2011	4:56:53 PM	PH3 valve closed
9/11/2011	4:56:53 PM	SiCl4 pre valve closed
9/11/2011	4:56:53 PM	SiCl4 post valve closed
9/11/2011	4:56:53 PM	Bypass valve closed
9/11/2011	4:56:53 PM	Bubbler valve closed
9/11/2011	4:56:53 PM	Helium valve opened
9/11/2011	4:56:53 PM	Main Vac valve opened
9/11/2011	4:56:53 PM	Helium MFC set to  20.000000
9/11/2011	4:56:53 PM	H2 MFC set to  0.000000
9/11/2011	4:56:53 PM	BCl3 MFC set to  0.000000
9/11/2011	4:56:53 PM	PHl3 MFC set to  0.000000
9/11/2011	4:56:53 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:56:53 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:56:53 PM	Tube furnace set to 0
9/11/2011	4:57:23 PM	Helium valve closed
9/11/2011	4:57:23 PM	H2 valve closed
9/11/2011	4:57:23 PM	BCl3 valve closed
9/11/2011	4:57:23 PM	PH3 valve closed
9/11/2011	4:57:23 PM	SiCl4 pre valve closed
9/11/2011	4:57:23 PM	SiCl4 post valve closed
9/11/2011	4:57:23 PM	Bypass valve closed
9/11/2011	4:57:23 PM	Bubbler valve closed
9/11/2011	4:57:23 PM	Main Vac valve opened
9/11/2011	4:57:23 PM	Helium MFC set to  0.000000
9/11/2011	4:57:23 PM	H2 MFC set to  0.000000
9/11/2011	4:57:23 PM	BCl3 MFC set to  0.000000
9/11/2011	4:57:23 PM	PHl3 MFC set to  0.000000
9/11/2011	4:57:23 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:57:23 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:57:23 PM	Tube furnace set to 0
9/11/2011	4:57:53 PM	H2 valve closed
9/11/2011	4:57:53 PM	BCl3 valve closed
9/11/2011	4:57:53 PM	PH3 valve closed
9/11/2011	4:57:53 PM	SiCl4 pre valve closed
9/11/2011	4:57:53 PM	SiCl4 post valve closed
9/11/2011	4:57:53 PM	Bypass valve closed
9/11/2011	4:57:53 PM	Bubbler valve closed
9/11/2011	4:57:53 PM	Helium valve opened
9/11/2011	4:57:53 PM	Main Vac valve opened
9/11/2011	4:57:53 PM	Helium MFC set to  20.000000
9/11/2011	4:57:53 PM	H2 MFC set to  0.000000
9/11/2011	4:57:53 PM	BCl3 MFC set to  0.000000
9/11/2011	4:57:53 PM	PHl3 MFC set to  0.000000
9/11/2011	4:57:53 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:57:53 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:57:53 PM	Tube furnace set to 0
9/11/2011	4:58:23 PM	Helium valve closed
9/11/2011	4:58:23 PM	H2 valve closed
9/11/2011	4:58:23 PM	BCl3 valve closed
9/11/2011	4:58:23 PM	PH3 valve closed
9/11/2011	4:58:23 PM	SiCl4 pre valve closed
9/11/2011	4:58:23 PM	SiCl4 post valve closed
9/11/2011	4:58:23 PM	Bypass valve closed
9/11/2011	4:58:23 PM	Bubbler valve closed
9/11/2011	4:58:23 PM	Main Vac valve opened
9/11/2011	4:58:23 PM	Helium MFC set to  0.000000
9/11/2011	4:58:23 PM	H2 MFC set to  0.000000
9/11/2011	4:58:23 PM	BCl3 MFC set to  0.000000
9/11/2011	4:58:23 PM	PHl3 MFC set to  0.000000
9/11/2011	4:58:23 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:58:23 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	4:58:24 PM	Tube furnace set to 0
9/11/2011	4:58:46 PM	Run aborted at 4:58 PM
9/11/2011	4:58:46 PM	Helium valve closed
9/11/2011	4:58:46 PM	H2 valve closed
9/11/2011	4:58:46 PM	BCl3 valve closed
9/11/2011	4:58:46 PM	PH3 valve closed
9/11/2011	4:58:46 PM	SiCl4 pre valve closed
9/11/2011	4:58:46 PM	SiCl4 post valve closed
9/11/2011	4:58:46 PM	Bypass valve closed
9/11/2011	4:58:46 PM	Main Vac valve closed
9/11/2011	4:58:46 PM	Bubbler valve closed
9/11/2011	4:58:46 PM	Helium MFC set to  0.000000
9/11/2011	4:58:46 PM	H2 MFC set to  0.000000
9/11/2011	4:58:46 PM	BCl3 MFC set to  0.000000
9/11/2011	4:58:46 PM	PHl3 MFC set to  0.000000
9/11/2011	4:58:46 PM	SiCl4 MFC set to  0.000000
9/11/2011	4:58:46 PM	Tube furnace set to 0
9/11/2011	4:58:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	4:58:49 PM	Main Vac valve opened
9/11/2011	5:00:23 PM	Main Vac valve closed
9/11/2011	5:00:33 PM	Tube furnace set to 180
9/11/2011	5:00:38 PM	Main Vac valve opened
9/11/2011	5:05:55 PM	Recipe started at 5:05 PM
9/11/2011	5:05:55 PM	Helium valve closed
9/11/2011	5:05:55 PM	H2 valve closed
9/11/2011	5:05:55 PM	BCl3 valve closed
9/11/2011	5:05:55 PM	PH3 valve closed
9/11/2011	5:05:55 PM	SiCl4 pre valve closed
9/11/2011	5:05:55 PM	SiCl4 post valve closed
9/11/2011	5:05:55 PM	Bypass valve closed
9/11/2011	5:05:55 PM	Bubbler valve closed
9/11/2011	5:05:55 PM	Main Vac valve opened
9/11/2011	5:05:55 PM	Helium MFC set to  0.000000
9/11/2011	5:05:55 PM	H2 MFC set to  0.000000
9/11/2011	5:05:55 PM	BCl3 MFC set to  0.000000
9/11/2011	5:05:55 PM	PHl3 MFC set to  0.000000
9/11/2011	5:05:55 PM	SiCl4 MFC set to  0.000000
9/11/2011	5:05:55 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	5:05:56 PM	Tube furnace set to 180
9/11/2011	6:05:56 PM	H2 valve closed
9/11/2011	6:05:56 PM	BCl3 valve closed
9/11/2011	6:05:56 PM	PH3 valve closed
9/11/2011	6:05:56 PM	SiCl4 pre valve closed
9/11/2011	6:05:56 PM	SiCl4 post valve closed
9/11/2011	6:05:56 PM	Bypass valve closed
9/11/2011	6:05:56 PM	Bubbler valve closed
9/11/2011	6:05:56 PM	Helium valve opened
9/11/2011	6:05:56 PM	Main Vac valve opened
9/11/2011	6:05:56 PM	Helium MFC set to  10.000000
9/11/2011	6:05:56 PM	H2 MFC set to  0.000000
9/11/2011	6:05:56 PM	BCl3 MFC set to  0.000000
9/11/2011	6:05:56 PM	PHl3 MFC set to  0.000000
9/11/2011	6:05:56 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:05:56 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:05:56 PM	Tube furnace set to 180
9/11/2011	6:06:26 PM	Helium valve closed
9/11/2011	6:06:26 PM	H2 valve closed
9/11/2011	6:06:26 PM	BCl3 valve closed
9/11/2011	6:06:26 PM	PH3 valve closed
9/11/2011	6:06:26 PM	SiCl4 pre valve closed
9/11/2011	6:06:26 PM	SiCl4 post valve closed
9/11/2011	6:06:26 PM	Bypass valve closed
9/11/2011	6:06:26 PM	Bubbler valve closed
9/11/2011	6:06:26 PM	Main Vac valve opened
9/11/2011	6:06:26 PM	Helium MFC set to  0.000000
9/11/2011	6:06:26 PM	H2 MFC set to  0.000000
9/11/2011	6:06:26 PM	BCl3 MFC set to  0.000000
9/11/2011	6:06:26 PM	PHl3 MFC set to  0.000000
9/11/2011	6:06:26 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:06:26 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:06:26 PM	Tube furnace set to 180
9/11/2011	6:06:56 PM	H2 valve closed
9/11/2011	6:06:56 PM	BCl3 valve closed
9/11/2011	6:06:56 PM	PH3 valve closed
9/11/2011	6:06:56 PM	SiCl4 pre valve closed
9/11/2011	6:06:56 PM	SiCl4 post valve closed
9/11/2011	6:06:56 PM	Bypass valve closed
9/11/2011	6:06:56 PM	Bubbler valve closed
9/11/2011	6:06:56 PM	Helium valve opened
9/11/2011	6:06:56 PM	Main Vac valve opened
9/11/2011	6:06:56 PM	Helium MFC set to  10.000000
9/11/2011	6:06:56 PM	H2 MFC set to  0.000000
9/11/2011	6:06:56 PM	BCl3 MFC set to  0.000000
9/11/2011	6:06:56 PM	PHl3 MFC set to  0.000000
9/11/2011	6:06:56 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:06:56 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:06:56 PM	Tube furnace set to 180
9/11/2011	6:07:26 PM	Helium valve closed
9/11/2011	6:07:26 PM	H2 valve closed
9/11/2011	6:07:26 PM	BCl3 valve closed
9/11/2011	6:07:26 PM	PH3 valve closed
9/11/2011	6:07:26 PM	SiCl4 pre valve closed
9/11/2011	6:07:26 PM	SiCl4 post valve closed
9/11/2011	6:07:26 PM	Bypass valve closed
9/11/2011	6:07:26 PM	Bubbler valve closed
9/11/2011	6:07:26 PM	Main Vac valve opened
9/11/2011	6:07:26 PM	Helium MFC set to  0.000000
9/11/2011	6:07:26 PM	H2 MFC set to  0.000000
9/11/2011	6:07:26 PM	BCl3 MFC set to  0.000000
9/11/2011	6:07:26 PM	PHl3 MFC set to  0.000000
9/11/2011	6:07:26 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:07:26 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:07:26 PM	Tube furnace set to 180
9/11/2011	6:09:26 PM	Helium valve closed
9/11/2011	6:09:26 PM	BCl3 valve closed
9/11/2011	6:09:26 PM	PH3 valve closed
9/11/2011	6:09:26 PM	SiCl4 pre valve closed
9/11/2011	6:09:26 PM	SiCl4 post valve closed
9/11/2011	6:09:26 PM	Main Vac valve closed
9/11/2011	6:09:26 PM	Bypass valve closed
9/11/2011	6:09:26 PM	Bubbler valve closed
9/11/2011	6:09:26 PM	H2 valve opened
9/11/2011	6:09:26 PM	Helium MFC set to  0.000000
9/11/2011	6:09:26 PM	H2 MFC set to  500.000000
9/11/2011	6:09:26 PM	BCl3 MFC set to  0.000000
9/11/2011	6:09:26 PM	PHl3 MFC set to  0.000000
9/11/2011	6:09:26 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:09:26 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:09:27 PM	Tube furnace set to 1000
9/11/2011	6:10:30 PM	Helium valve closed
9/11/2011	6:10:30 PM	BCl3 valve closed
9/11/2011	6:10:30 PM	PH3 valve closed
9/11/2011	6:10:30 PM	SiCl4 pre valve closed
9/11/2011	6:10:30 PM	SiCl4 post valve closed
9/11/2011	6:10:30 PM	Main Vac valve closed
9/11/2011	6:10:30 PM	Bypass valve closed
9/11/2011	6:10:30 PM	H2 valve opened
9/11/2011	6:10:30 PM	Bubbler valve opened
9/11/2011	6:10:30 PM	Helium MFC set to  0.000000
9/11/2011	6:10:30 PM	H2 MFC set to  500.000000
9/11/2011	6:10:30 PM	BCl3 MFC set to  0.000000
9/11/2011	6:10:30 PM	PHl3 MFC set to  0.000000
9/11/2011	6:10:30 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:10:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:10:30 PM	Tube furnace set to 1000
9/11/2011	6:10:31 PM	Helium valve closed
9/11/2011	6:10:31 PM	BCl3 valve closed
9/11/2011	6:10:31 PM	PH3 valve closed
9/11/2011	6:10:31 PM	SiCl4 pre valve closed
9/11/2011	6:10:31 PM	SiCl4 post valve closed
9/11/2011	6:10:31 PM	Main Vac valve closed
9/11/2011	6:10:31 PM	Bypass valve closed
9/11/2011	6:10:31 PM	H2 valve opened
9/11/2011	6:10:31 PM	Bubbler valve opened
9/11/2011	6:10:31 PM	Helium MFC set to  0.000000
9/11/2011	6:10:31 PM	H2 MFC set to  500.000000
9/11/2011	6:10:31 PM	BCl3 MFC set to  0.000000
9/11/2011	6:10:31 PM	PHl3 MFC set to  0.000000
9/11/2011	6:10:31 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:10:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:10:31 PM	Tube furnace set to 1000
9/11/2011	6:30:31 PM	Helium valve closed
9/11/2011	6:30:31 PM	PH3 valve closed
9/11/2011	6:30:31 PM	Main Vac valve closed
9/11/2011	6:30:31 PM	Bypass valve closed
9/11/2011	6:30:31 PM	H2 valve opened
9/11/2011	6:30:31 PM	BCl3 valve opened
9/11/2011	6:30:31 PM	SiCl4 pre valve opened
9/11/2011	6:30:31 PM	SiCl4 post valve opened
9/11/2011	6:30:31 PM	Bubbler valve opened
9/11/2011	6:30:31 PM	Helium MFC set to  0.000000
9/11/2011	6:30:31 PM	H2 MFC set to  500.000000
9/11/2011	6:30:31 PM	BCl3 MFC set to  2.000000
9/11/2011	6:30:31 PM	PHl3 MFC set to  0.000000
9/11/2011	6:30:31 PM	SiCl4 MFC set to  50.000000
9/11/2011	6:30:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:30:31 PM	Tube furnace set to 1000
9/11/2011	6:42:31 PM	Helium valve closed
9/11/2011	6:42:31 PM	BCl3 valve closed
9/11/2011	6:42:31 PM	PH3 valve closed
9/11/2011	6:42:31 PM	SiCl4 pre valve closed
9/11/2011	6:42:31 PM	SiCl4 post valve closed
9/11/2011	6:42:31 PM	Main Vac valve closed
9/11/2011	6:42:31 PM	Bypass valve closed
9/11/2011	6:42:31 PM	H2 valve opened
9/11/2011	6:42:31 PM	Bubbler valve opened
9/11/2011	6:42:31 PM	Helium MFC set to  0.000000
9/11/2011	6:42:31 PM	H2 MFC set to  500.000000
9/11/2011	6:42:31 PM	BCl3 MFC set to  0.000000
9/11/2011	6:42:31 PM	PHl3 MFC set to  0.000000
9/11/2011	6:42:31 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:42:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:42:32 PM	Tube furnace set to 975
9/11/2011	6:43:32 PM	Helium valve closed
9/11/2011	6:43:32 PM	BCl3 valve closed
9/11/2011	6:43:32 PM	PH3 valve closed
9/11/2011	6:43:32 PM	SiCl4 pre valve closed
9/11/2011	6:43:32 PM	SiCl4 post valve closed
9/11/2011	6:43:32 PM	Main Vac valve closed
9/11/2011	6:43:32 PM	Bypass valve closed
9/11/2011	6:43:32 PM	H2 valve opened
9/11/2011	6:43:32 PM	Bubbler valve opened
9/11/2011	6:43:32 PM	Helium MFC set to  0.000000
9/11/2011	6:43:32 PM	H2 MFC set to  500.000000
9/11/2011	6:43:32 PM	BCl3 MFC set to  0.000000
9/11/2011	6:43:32 PM	PHl3 MFC set to  0.000000
9/11/2011	6:43:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:43:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:43:32 PM	Tube furnace set to 950
9/11/2011	6:44:32 PM	Helium valve closed
9/11/2011	6:44:32 PM	BCl3 valve closed
9/11/2011	6:44:32 PM	PH3 valve closed
9/11/2011	6:44:32 PM	SiCl4 pre valve closed
9/11/2011	6:44:32 PM	SiCl4 post valve closed
9/11/2011	6:44:32 PM	Main Vac valve closed
9/11/2011	6:44:32 PM	Bypass valve closed
9/11/2011	6:44:32 PM	H2 valve opened
9/11/2011	6:44:32 PM	Bubbler valve opened
9/11/2011	6:44:32 PM	Helium MFC set to  0.000000
9/11/2011	6:44:32 PM	H2 MFC set to  500.000000
9/11/2011	6:44:32 PM	BCl3 MFC set to  0.000000
9/11/2011	6:44:32 PM	PHl3 MFC set to  0.000000
9/11/2011	6:44:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:44:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:44:32 PM	Tube furnace set to 925
9/11/2011	6:45:32 PM	Helium valve closed
9/11/2011	6:45:32 PM	BCl3 valve closed
9/11/2011	6:45:32 PM	PH3 valve closed
9/11/2011	6:45:32 PM	SiCl4 pre valve closed
9/11/2011	6:45:32 PM	SiCl4 post valve closed
9/11/2011	6:45:32 PM	Main Vac valve closed
9/11/2011	6:45:32 PM	Bypass valve closed
9/11/2011	6:45:32 PM	H2 valve opened
9/11/2011	6:45:32 PM	Bubbler valve opened
9/11/2011	6:45:32 PM	Helium MFC set to  0.000000
9/11/2011	6:45:32 PM	H2 MFC set to  500.000000
9/11/2011	6:45:32 PM	BCl3 MFC set to  0.000000
9/11/2011	6:45:32 PM	PHl3 MFC set to  0.000000
9/11/2011	6:45:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:45:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:45:32 PM	Tube furnace set to 900
9/11/2011	6:46:32 PM	H2 valve closed
9/11/2011	6:46:32 PM	BCl3 valve closed
9/11/2011	6:46:32 PM	PH3 valve closed
9/11/2011	6:46:32 PM	SiCl4 pre valve closed
9/11/2011	6:46:32 PM	SiCl4 post valve closed
9/11/2011	6:46:32 PM	Main Vac valve closed
9/11/2011	6:46:32 PM	Bypass valve closed
9/11/2011	6:46:32 PM	Helium valve opened
9/11/2011	6:46:32 PM	Bubbler valve opened
9/11/2011	6:46:32 PM	Helium MFC set to  500.000000
9/11/2011	6:46:32 PM	H2 MFC set to  0.000000
9/11/2011	6:46:32 PM	BCl3 MFC set to  0.000000
9/11/2011	6:46:32 PM	PHl3 MFC set to  0.000000
9/11/2011	6:46:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	6:46:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	6:46:32 PM	Tube furnace set to 0
9/11/2011	7:06:32 PM	Helium valve closed
9/11/2011	7:06:32 PM	H2 valve closed
9/11/2011	7:06:32 PM	BCl3 valve closed
9/11/2011	7:06:32 PM	PH3 valve closed
9/11/2011	7:06:32 PM	SiCl4 pre valve closed
9/11/2011	7:06:32 PM	SiCl4 post valve closed
9/11/2011	7:06:32 PM	Main Vac valve closed
9/11/2011	7:06:32 PM	Bypass valve closed
9/11/2011	7:06:32 PM	Bubbler valve closed
9/11/2011	7:06:32 PM	Helium MFC set to  0.000000
9/11/2011	7:06:32 PM	H2 MFC set to  0.000000
9/11/2011	7:06:32 PM	BCl3 MFC set to  0.000000
9/11/2011	7:06:32 PM	PHl3 MFC set to  0.000000
9/11/2011	7:06:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	7:06:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	7:06:32 PM	Tube furnace set to 0
9/11/2011	8:06:32 PM	H2 valve closed
9/11/2011	8:06:32 PM	BCl3 valve closed
9/11/2011	8:06:32 PM	PH3 valve closed
9/11/2011	8:06:32 PM	SiCl4 pre valve closed
9/11/2011	8:06:32 PM	SiCl4 post valve closed
9/11/2011	8:06:32 PM	Main Vac valve closed
9/11/2011	8:06:32 PM	Bypass valve closed
9/11/2011	8:06:32 PM	Bubbler valve closed
9/11/2011	8:06:32 PM	Helium valve opened
9/11/2011	8:06:32 PM	Helium MFC set to  500.000000
9/11/2011	8:06:32 PM	H2 MFC set to  0.000000
9/11/2011	8:06:32 PM	BCl3 MFC set to  0.000000
9/11/2011	8:06:32 PM	PHl3 MFC set to  0.000000
9/11/2011	8:06:32 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:06:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:06:33 PM	Tube furnace set to 0
9/11/2011	8:06:38 PM	H2 valve closed
9/11/2011	8:06:38 PM	BCl3 valve closed
9/11/2011	8:06:38 PM	PH3 valve closed
9/11/2011	8:06:38 PM	SiCl4 pre valve closed
9/11/2011	8:06:38 PM	SiCl4 post valve closed
9/11/2011	8:06:38 PM	Main Vac valve closed
9/11/2011	8:06:38 PM	Bypass valve closed
9/11/2011	8:06:38 PM	Helium valve opened
9/11/2011	8:06:38 PM	Bubbler valve opened
9/11/2011	8:06:38 PM	Helium MFC set to  500.000000
9/11/2011	8:06:38 PM	H2 MFC set to  0.000000
9/11/2011	8:06:38 PM	BCl3 MFC set to  0.000000
9/11/2011	8:06:38 PM	PHl3 MFC set to  0.000000
9/11/2011	8:06:38 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:06:38 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:06:38 PM	Tube furnace set to 0
9/11/2011	8:11:38 PM	Helium valve closed
9/11/2011	8:11:38 PM	H2 valve closed
9/11/2011	8:11:38 PM	BCl3 valve closed
9/11/2011	8:11:38 PM	PH3 valve closed
9/11/2011	8:11:38 PM	SiCl4 pre valve closed
9/11/2011	8:11:38 PM	SiCl4 post valve closed
9/11/2011	8:11:38 PM	Main Vac valve closed
9/11/2011	8:11:38 PM	Bypass valve closed
9/11/2011	8:11:38 PM	Bubbler valve closed
9/11/2011	8:11:38 PM	Helium MFC set to  0.000000
9/11/2011	8:11:38 PM	H2 MFC set to  0.000000
9/11/2011	8:11:38 PM	BCl3 MFC set to  0.000000
9/11/2011	8:11:38 PM	PHl3 MFC set to  0.000000
9/11/2011	8:11:38 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:11:38 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:11:38 PM	Tube furnace set to 0
9/11/2011	8:11:40 PM	Helium valve closed
9/11/2011	8:11:40 PM	H2 valve closed
9/11/2011	8:11:40 PM	BCl3 valve closed
9/11/2011	8:11:40 PM	PH3 valve closed
9/11/2011	8:11:40 PM	SiCl4 pre valve closed
9/11/2011	8:11:40 PM	SiCl4 post valve closed
9/11/2011	8:11:40 PM	Main Vac valve closed
9/11/2011	8:11:40 PM	Bubbler valve closed
9/11/2011	8:11:40 PM	Bypass valve opened
9/11/2011	8:11:40 PM	Helium MFC set to  0.000000
9/11/2011	8:11:40 PM	H2 MFC set to  0.000000
9/11/2011	8:11:40 PM	BCl3 MFC set to  0.000000
9/11/2011	8:11:40 PM	PHl3 MFC set to  0.000000
9/11/2011	8:11:40 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:11:40 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:11:40 PM	Tube furnace set to 0
9/11/2011	8:12:29 PM	Helium valve closed
9/11/2011	8:12:29 PM	H2 valve closed
9/11/2011	8:12:29 PM	BCl3 valve closed
9/11/2011	8:12:29 PM	PH3 valve closed
9/11/2011	8:12:29 PM	SiCl4 pre valve closed
9/11/2011	8:12:29 PM	SiCl4 post valve closed
9/11/2011	8:12:29 PM	Main Vac valve closed
9/11/2011	8:12:29 PM	Bubbler valve closed
9/11/2011	8:12:29 PM	Bypass valve opened
9/11/2011	8:12:29 PM	Helium MFC set to  0.000000
9/11/2011	8:12:29 PM	H2 MFC set to  0.000000
9/11/2011	8:12:29 PM	BCl3 MFC set to  0.000000
9/11/2011	8:12:29 PM	PHl3 MFC set to  0.000000
9/11/2011	8:12:29 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:12:29 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:12:29 PM	Tube furnace set to 0
9/11/2011	8:13:29 PM	Helium valve closed
9/11/2011	8:13:29 PM	H2 valve closed
9/11/2011	8:13:29 PM	BCl3 valve closed
9/11/2011	8:13:29 PM	PH3 valve closed
9/11/2011	8:13:29 PM	SiCl4 pre valve closed
9/11/2011	8:13:29 PM	SiCl4 post valve closed
9/11/2011	8:13:29 PM	Bypass valve closed
9/11/2011	8:13:29 PM	Bubbler valve closed
9/11/2011	8:13:29 PM	Main Vac valve opened
9/11/2011	8:13:29 PM	Helium MFC set to  0.000000
9/11/2011	8:13:29 PM	H2 MFC set to  0.000000
9/11/2011	8:13:29 PM	BCl3 MFC set to  0.000000
9/11/2011	8:13:29 PM	PHl3 MFC set to  0.000000
9/11/2011	8:13:29 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:13:29 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:13:29 PM	Tube furnace set to 0
9/11/2011	8:58:41 PM	Run aborted at 8:58 PM
9/11/2011	8:58:41 PM	Helium valve closed
9/11/2011	8:58:41 PM	H2 valve closed
9/11/2011	8:58:41 PM	BCl3 valve closed
9/11/2011	8:58:41 PM	PH3 valve closed
9/11/2011	8:58:41 PM	SiCl4 pre valve closed
9/11/2011	8:58:41 PM	SiCl4 post valve closed
9/11/2011	8:58:41 PM	Bypass valve closed
9/11/2011	8:58:41 PM	Main Vac valve closed
9/11/2011	8:58:41 PM	Bubbler valve closed
9/11/2011	8:58:41 PM	Helium MFC set to  0.000000
9/11/2011	8:58:41 PM	H2 MFC set to  0.000000
9/11/2011	8:58:41 PM	BCl3 MFC set to  0.000000
9/11/2011	8:58:41 PM	PHl3 MFC set to  0.000000
9/11/2011	8:58:41 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:58:41 PM	Tube furnace set to 0
9/11/2011	8:58:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	8:58:47 PM	Recipe started at 8:58 PM
9/11/2011	8:58:47 PM	Helium valve closed
9/11/2011	8:58:47 PM	H2 valve closed
9/11/2011	8:58:47 PM	BCl3 valve closed
9/11/2011	8:58:47 PM	PH3 valve closed
9/11/2011	8:58:47 PM	SiCl4 pre valve closed
9/11/2011	8:58:47 PM	SiCl4 post valve closed
9/11/2011	8:58:47 PM	Main Vac valve closed
9/11/2011	8:58:47 PM	Bypass valve closed
9/11/2011	8:58:47 PM	Bubbler valve closed
9/11/2011	8:58:47 PM	Helium MFC set to  0.000000
9/11/2011	8:58:47 PM	H2 MFC set to  0.000000
9/11/2011	8:58:47 PM	BCl3 MFC set to  0.000000
9/11/2011	8:58:47 PM	PHl3 MFC set to  0.000000
9/11/2011	8:58:47 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:58:47 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:58:47 PM	Tube furnace set to 0
9/11/2011	8:58:50 PM	H2 valve closed
9/11/2011	8:58:50 PM	BCl3 valve closed
9/11/2011	8:58:50 PM	PH3 valve closed
9/11/2011	8:58:50 PM	SiCl4 pre valve closed
9/11/2011	8:58:50 PM	SiCl4 post valve closed
9/11/2011	8:58:50 PM	Main Vac valve closed
9/11/2011	8:58:50 PM	Bypass valve closed
9/11/2011	8:58:50 PM	Bubbler valve closed
9/11/2011	8:58:50 PM	Helium valve opened
9/11/2011	8:58:50 PM	Helium MFC set to  500.000000
9/11/2011	8:58:50 PM	H2 MFC set to  0.000000
9/11/2011	8:58:50 PM	BCl3 MFC set to  0.000000
9/11/2011	8:58:50 PM	PHl3 MFC set to  0.000000
9/11/2011	8:58:50 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:58:50 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:58:50 PM	Tube furnace set to 0
9/11/2011	8:59:51 PM	Helium valve closed
9/11/2011	8:59:51 PM	H2 valve closed
9/11/2011	8:59:51 PM	BCl3 valve closed
9/11/2011	8:59:51 PM	PH3 valve closed
9/11/2011	8:59:51 PM	SiCl4 pre valve closed
9/11/2011	8:59:51 PM	SiCl4 post valve closed
9/11/2011	8:59:51 PM	Main Vac valve closed
9/11/2011	8:59:51 PM	Bypass valve closed
9/11/2011	8:59:51 PM	Bubbler valve closed
9/11/2011	8:59:51 PM	Helium MFC set to  0.000000
9/11/2011	8:59:51 PM	H2 MFC set to  0.000000
9/11/2011	8:59:51 PM	BCl3 MFC set to  0.000000
9/11/2011	8:59:51 PM	PHl3 MFC set to  0.000000
9/11/2011	8:59:51 PM	SiCl4 MFC set to  0.000000
9/11/2011	8:59:51 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	8:59:52 PM	Tube furnace set to 0
9/11/2011	8:59:53 PM	Run finished at 8:59 PM
9/11/2011	8:59:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2011	9:03:39 PM	Helium MFC set to  500.000000
9/11/2011	9:03:40 PM	Helium valve opened
9/11/2011	9:03:43 PM	Bubbler valve opened
9/11/2011	9:04:50 PM	Helium MFC set to  500.000000
9/11/2011	9:04:53 PM	Bubbler valve closed
9/11/2011	9:04:53 PM	Helium valve closed
9/11/2011	9:04:57 PM	Helium MFC set to  0.000000
9/11/2011	9:05:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	9:05:14 PM	Recipe started at 9:05 PM
9/11/2011	9:05:14 PM	Helium valve closed
9/11/2011	9:05:14 PM	H2 valve closed
9/11/2011	9:05:14 PM	BCl3 valve closed
9/11/2011	9:05:14 PM	PH3 valve closed
9/11/2011	9:05:14 PM	SiCl4 pre valve closed
9/11/2011	9:05:14 PM	SiCl4 post valve closed
9/11/2011	9:05:14 PM	Main Vac valve closed
9/11/2011	9:05:14 PM	Bubbler valve closed
9/11/2011	9:05:14 PM	Bypass valve opened
9/11/2011	9:05:14 PM	Helium MFC set to  0.000000
9/11/2011	9:05:14 PM	H2 MFC set to  0.000000
9/11/2011	9:05:14 PM	BCl3 MFC set to  0.000000
9/11/2011	9:05:14 PM	PHl3 MFC set to  0.000000
9/11/2011	9:05:14 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:05:14 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:05:14 PM	Tube furnace set to 0
9/11/2011	9:06:13 PM	Helium valve closed
9/11/2011	9:06:13 PM	H2 valve closed
9/11/2011	9:06:13 PM	BCl3 valve closed
9/11/2011	9:06:13 PM	PH3 valve closed
9/11/2011	9:06:13 PM	SiCl4 pre valve closed
9/11/2011	9:06:13 PM	SiCl4 post valve closed
9/11/2011	9:06:13 PM	Main Vac valve closed
9/11/2011	9:06:13 PM	Bubbler valve closed
9/11/2011	9:06:13 PM	Bypass valve opened
9/11/2011	9:06:13 PM	Helium MFC set to  0.000000
9/11/2011	9:06:13 PM	H2 MFC set to  0.000000
9/11/2011	9:06:13 PM	BCl3 MFC set to  0.000000
9/11/2011	9:06:13 PM	PHl3 MFC set to  0.000000
9/11/2011	9:06:13 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:06:13 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:06:14 PM	Tube furnace set to 0
9/11/2011	9:06:44 PM	Helium valve closed
9/11/2011	9:06:44 PM	H2 valve closed
9/11/2011	9:06:44 PM	BCl3 valve closed
9/11/2011	9:06:44 PM	PH3 valve closed
9/11/2011	9:06:44 PM	SiCl4 pre valve closed
9/11/2011	9:06:44 PM	SiCl4 post valve closed
9/11/2011	9:06:44 PM	Bypass valve closed
9/11/2011	9:06:44 PM	Bubbler valve closed
9/11/2011	9:06:44 PM	Main Vac valve opened
9/11/2011	9:06:44 PM	Helium MFC set to  0.000000
9/11/2011	9:06:44 PM	H2 MFC set to  0.000000
9/11/2011	9:06:44 PM	BCl3 MFC set to  0.000000
9/11/2011	9:06:44 PM	PHl3 MFC set to  0.000000
9/11/2011	9:06:44 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:06:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:06:44 PM	Tube furnace set to 0
9/11/2011	9:07:14 PM	H2 valve closed
9/11/2011	9:07:14 PM	BCl3 valve closed
9/11/2011	9:07:14 PM	PH3 valve closed
9/11/2011	9:07:14 PM	SiCl4 pre valve closed
9/11/2011	9:07:14 PM	SiCl4 post valve closed
9/11/2011	9:07:14 PM	Bypass valve closed
9/11/2011	9:07:14 PM	Bubbler valve closed
9/11/2011	9:07:14 PM	Helium valve opened
9/11/2011	9:07:14 PM	Main Vac valve opened
9/11/2011	9:07:14 PM	Helium MFC set to  20.000000
9/11/2011	9:07:14 PM	H2 MFC set to  0.000000
9/11/2011	9:07:14 PM	BCl3 MFC set to  0.000000
9/11/2011	9:07:14 PM	PHl3 MFC set to  0.000000
9/11/2011	9:07:14 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:07:14 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:07:14 PM	Tube furnace set to 0
9/11/2011	9:07:44 PM	Helium valve closed
9/11/2011	9:07:44 PM	H2 valve closed
9/11/2011	9:07:44 PM	BCl3 valve closed
9/11/2011	9:07:44 PM	PH3 valve closed
9/11/2011	9:07:44 PM	SiCl4 pre valve closed
9/11/2011	9:07:44 PM	SiCl4 post valve closed
9/11/2011	9:07:44 PM	Bypass valve closed
9/11/2011	9:07:44 PM	Bubbler valve closed
9/11/2011	9:07:44 PM	Main Vac valve opened
9/11/2011	9:07:44 PM	Helium MFC set to  0.000000
9/11/2011	9:07:44 PM	H2 MFC set to  0.000000
9/11/2011	9:07:44 PM	BCl3 MFC set to  0.000000
9/11/2011	9:07:44 PM	PHl3 MFC set to  0.000000
9/11/2011	9:07:44 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:07:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:07:44 PM	Tube furnace set to 0
9/11/2011	9:08:14 PM	H2 valve closed
9/11/2011	9:08:14 PM	BCl3 valve closed
9/11/2011	9:08:14 PM	PH3 valve closed
9/11/2011	9:08:14 PM	SiCl4 pre valve closed
9/11/2011	9:08:14 PM	SiCl4 post valve closed
9/11/2011	9:08:14 PM	Bypass valve closed
9/11/2011	9:08:14 PM	Bubbler valve closed
9/11/2011	9:08:14 PM	Helium valve opened
9/11/2011	9:08:14 PM	Main Vac valve opened
9/11/2011	9:08:14 PM	Helium MFC set to  20.000000
9/11/2011	9:08:14 PM	H2 MFC set to  0.000000
9/11/2011	9:08:14 PM	BCl3 MFC set to  0.000000
9/11/2011	9:08:14 PM	PHl3 MFC set to  0.000000
9/11/2011	9:08:14 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:08:14 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:08:14 PM	Tube furnace set to 0
9/11/2011	9:08:44 PM	Helium valve closed
9/11/2011	9:08:44 PM	H2 valve closed
9/11/2011	9:08:44 PM	BCl3 valve closed
9/11/2011	9:08:44 PM	PH3 valve closed
9/11/2011	9:08:44 PM	SiCl4 pre valve closed
9/11/2011	9:08:44 PM	SiCl4 post valve closed
9/11/2011	9:08:44 PM	Bypass valve closed
9/11/2011	9:08:44 PM	Bubbler valve closed
9/11/2011	9:08:44 PM	Main Vac valve opened
9/11/2011	9:08:44 PM	Helium MFC set to  0.000000
9/11/2011	9:08:44 PM	H2 MFC set to  0.000000
9/11/2011	9:08:44 PM	BCl3 MFC set to  0.000000
9/11/2011	9:08:44 PM	PHl3 MFC set to  0.000000
9/11/2011	9:08:44 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:08:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:08:45 PM	Tube furnace set to 0
9/11/2011	9:09:15 PM	H2 valve closed
9/11/2011	9:09:15 PM	BCl3 valve closed
9/11/2011	9:09:15 PM	PH3 valve closed
9/11/2011	9:09:15 PM	SiCl4 pre valve closed
9/11/2011	9:09:15 PM	SiCl4 post valve closed
9/11/2011	9:09:15 PM	Bypass valve closed
9/11/2011	9:09:15 PM	Bubbler valve closed
9/11/2011	9:09:15 PM	Helium valve opened
9/11/2011	9:09:15 PM	Main Vac valve opened
9/11/2011	9:09:15 PM	Helium MFC set to  20.000000
9/11/2011	9:09:15 PM	H2 MFC set to  0.000000
9/11/2011	9:09:15 PM	BCl3 MFC set to  0.000000
9/11/2011	9:09:15 PM	PHl3 MFC set to  0.000000
9/11/2011	9:09:15 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:09:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:09:15 PM	Tube furnace set to 0
9/11/2011	9:09:45 PM	Helium valve closed
9/11/2011	9:09:45 PM	H2 valve closed
9/11/2011	9:09:45 PM	BCl3 valve closed
9/11/2011	9:09:45 PM	PH3 valve closed
9/11/2011	9:09:45 PM	SiCl4 pre valve closed
9/11/2011	9:09:45 PM	SiCl4 post valve closed
9/11/2011	9:09:45 PM	Bypass valve closed
9/11/2011	9:09:45 PM	Bubbler valve closed
9/11/2011	9:09:45 PM	Main Vac valve opened
9/11/2011	9:09:45 PM	Helium MFC set to  0.000000
9/11/2011	9:09:45 PM	H2 MFC set to  0.000000
9/11/2011	9:09:45 PM	BCl3 MFC set to  0.000000
9/11/2011	9:09:45 PM	PHl3 MFC set to  0.000000
9/11/2011	9:09:45 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:09:45 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:09:45 PM	Tube furnace set to 0
9/11/2011	9:10:15 PM	Run aborted at 9:10 PM
9/11/2011	9:10:15 PM	Helium valve closed
9/11/2011	9:10:15 PM	H2 valve closed
9/11/2011	9:10:15 PM	BCl3 valve closed
9/11/2011	9:10:15 PM	PH3 valve closed
9/11/2011	9:10:15 PM	SiCl4 pre valve closed
9/11/2011	9:10:15 PM	SiCl4 post valve closed
9/11/2011	9:10:15 PM	Bypass valve closed
9/11/2011	9:10:15 PM	Main Vac valve closed
9/11/2011	9:10:15 PM	Bubbler valve closed
9/11/2011	9:10:15 PM	Helium MFC set to  0.000000
9/11/2011	9:10:15 PM	H2 MFC set to  0.000000
9/11/2011	9:10:15 PM	BCl3 MFC set to  0.000000
9/11/2011	9:10:15 PM	PHl3 MFC set to  0.000000
9/11/2011	9:10:15 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:10:15 PM	Tube furnace set to 0
9/11/2011	9:10:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2011	9:10:17 PM	Main Vac valve opened
9/11/2011	9:26:08 PM	Recipe started at 9:26 PM
9/11/2011	9:26:08 PM	Helium valve closed
9/11/2011	9:26:08 PM	H2 valve closed
9/11/2011	9:26:08 PM	BCl3 valve closed
9/11/2011	9:26:08 PM	PH3 valve closed
9/11/2011	9:26:08 PM	SiCl4 pre valve closed
9/11/2011	9:26:08 PM	SiCl4 post valve closed
9/11/2011	9:26:08 PM	Bypass valve closed
9/11/2011	9:26:08 PM	Bubbler valve closed
9/11/2011	9:26:08 PM	Main Vac valve opened
9/11/2011	9:26:08 PM	Helium MFC set to  0.000000
9/11/2011	9:26:08 PM	H2 MFC set to  0.000000
9/11/2011	9:26:08 PM	BCl3 MFC set to  0.000000
9/11/2011	9:26:08 PM	PHl3 MFC set to  0.000000
9/11/2011	9:26:08 PM	SiCl4 MFC set to  0.000000
9/11/2011	9:26:08 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	9:26:08 PM	Tube furnace set to 180
9/11/2011	10:26:08 PM	H2 valve closed
9/11/2011	10:26:08 PM	BCl3 valve closed
9/11/2011	10:26:08 PM	PH3 valve closed
9/11/2011	10:26:08 PM	SiCl4 pre valve closed
9/11/2011	10:26:08 PM	SiCl4 post valve closed
9/11/2011	10:26:08 PM	Bypass valve closed
9/11/2011	10:26:08 PM	Bubbler valve closed
9/11/2011	10:26:08 PM	Helium valve opened
9/11/2011	10:26:08 PM	Main Vac valve opened
9/11/2011	10:26:08 PM	Helium MFC set to  10.000000
9/11/2011	10:26:08 PM	H2 MFC set to  0.000000
9/11/2011	10:26:08 PM	BCl3 MFC set to  0.000000
9/11/2011	10:26:08 PM	PHl3 MFC set to  0.000000
9/11/2011	10:26:08 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:26:08 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:26:09 PM	Tube furnace set to 180
9/11/2011	10:26:39 PM	Helium valve closed
9/11/2011	10:26:39 PM	H2 valve closed
9/11/2011	10:26:39 PM	BCl3 valve closed
9/11/2011	10:26:39 PM	PH3 valve closed
9/11/2011	10:26:39 PM	SiCl4 pre valve closed
9/11/2011	10:26:39 PM	SiCl4 post valve closed
9/11/2011	10:26:39 PM	Bypass valve closed
9/11/2011	10:26:39 PM	Bubbler valve closed
9/11/2011	10:26:39 PM	Main Vac valve opened
9/11/2011	10:26:39 PM	Helium MFC set to  0.000000
9/11/2011	10:26:39 PM	H2 MFC set to  0.000000
9/11/2011	10:26:39 PM	BCl3 MFC set to  0.000000
9/11/2011	10:26:39 PM	PHl3 MFC set to  0.000000
9/11/2011	10:26:39 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:26:39 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:26:39 PM	Tube furnace set to 180
9/11/2011	10:27:09 PM	H2 valve closed
9/11/2011	10:27:09 PM	BCl3 valve closed
9/11/2011	10:27:09 PM	PH3 valve closed
9/11/2011	10:27:09 PM	SiCl4 pre valve closed
9/11/2011	10:27:09 PM	SiCl4 post valve closed
9/11/2011	10:27:09 PM	Bypass valve closed
9/11/2011	10:27:09 PM	Bubbler valve closed
9/11/2011	10:27:09 PM	Helium valve opened
9/11/2011	10:27:09 PM	Main Vac valve opened
9/11/2011	10:27:09 PM	Helium MFC set to  10.000000
9/11/2011	10:27:09 PM	H2 MFC set to  0.000000
9/11/2011	10:27:09 PM	BCl3 MFC set to  0.000000
9/11/2011	10:27:09 PM	PHl3 MFC set to  0.000000
9/11/2011	10:27:09 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:27:09 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:27:09 PM	Tube furnace set to 180
9/11/2011	10:27:39 PM	Helium valve closed
9/11/2011	10:27:39 PM	H2 valve closed
9/11/2011	10:27:39 PM	BCl3 valve closed
9/11/2011	10:27:39 PM	PH3 valve closed
9/11/2011	10:27:39 PM	SiCl4 pre valve closed
9/11/2011	10:27:39 PM	SiCl4 post valve closed
9/11/2011	10:27:39 PM	Bypass valve closed
9/11/2011	10:27:39 PM	Bubbler valve closed
9/11/2011	10:27:39 PM	Main Vac valve opened
9/11/2011	10:27:39 PM	Helium MFC set to  0.000000
9/11/2011	10:27:39 PM	H2 MFC set to  0.000000
9/11/2011	10:27:39 PM	BCl3 MFC set to  0.000000
9/11/2011	10:27:39 PM	PHl3 MFC set to  0.000000
9/11/2011	10:27:39 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:27:39 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:27:39 PM	Tube furnace set to 180
9/11/2011	10:29:39 PM	Helium valve closed
9/11/2011	10:29:39 PM	BCl3 valve closed
9/11/2011	10:29:39 PM	PH3 valve closed
9/11/2011	10:29:39 PM	SiCl4 pre valve closed
9/11/2011	10:29:39 PM	SiCl4 post valve closed
9/11/2011	10:29:39 PM	Main Vac valve closed
9/11/2011	10:29:39 PM	Bypass valve closed
9/11/2011	10:29:39 PM	Bubbler valve closed
9/11/2011	10:29:39 PM	H2 valve opened
9/11/2011	10:29:39 PM	Helium MFC set to  0.000000
9/11/2011	10:29:39 PM	H2 MFC set to  500.000000
9/11/2011	10:29:39 PM	BCl3 MFC set to  0.000000
9/11/2011	10:29:39 PM	PHl3 MFC set to  0.000000
9/11/2011	10:29:39 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:29:39 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:29:39 PM	Tube furnace set to 1000
9/11/2011	10:30:43 PM	Helium valve closed
9/11/2011	10:30:43 PM	BCl3 valve closed
9/11/2011	10:30:43 PM	PH3 valve closed
9/11/2011	10:30:43 PM	SiCl4 pre valve closed
9/11/2011	10:30:43 PM	SiCl4 post valve closed
9/11/2011	10:30:43 PM	Main Vac valve closed
9/11/2011	10:30:43 PM	Bypass valve closed
9/11/2011	10:30:43 PM	H2 valve opened
9/11/2011	10:30:43 PM	Bubbler valve opened
9/11/2011	10:30:43 PM	Helium MFC set to  0.000000
9/11/2011	10:30:43 PM	H2 MFC set to  500.000000
9/11/2011	10:30:43 PM	BCl3 MFC set to  0.000000
9/11/2011	10:30:43 PM	PHl3 MFC set to  0.000000
9/11/2011	10:30:43 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:30:43 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:30:43 PM	Tube furnace set to 1000
9/11/2011	10:30:44 PM	Helium valve closed
9/11/2011	10:30:44 PM	BCl3 valve closed
9/11/2011	10:30:44 PM	PH3 valve closed
9/11/2011	10:30:44 PM	SiCl4 pre valve closed
9/11/2011	10:30:44 PM	SiCl4 post valve closed
9/11/2011	10:30:44 PM	Main Vac valve closed
9/11/2011	10:30:44 PM	Bypass valve closed
9/11/2011	10:30:44 PM	H2 valve opened
9/11/2011	10:30:44 PM	Bubbler valve opened
9/11/2011	10:30:44 PM	Helium MFC set to  0.000000
9/11/2011	10:30:44 PM	H2 MFC set to  500.000000
9/11/2011	10:30:44 PM	BCl3 MFC set to  0.000000
9/11/2011	10:30:44 PM	PHl3 MFC set to  0.000000
9/11/2011	10:30:44 PM	SiCl4 MFC set to  0.000000
9/11/2011	10:30:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:30:44 PM	Tube furnace set to 1000
9/11/2011	10:50:44 PM	Helium valve closed
9/11/2011	10:50:44 PM	PH3 valve closed
9/11/2011	10:50:44 PM	Main Vac valve closed
9/11/2011	10:50:44 PM	Bypass valve closed
9/11/2011	10:50:44 PM	H2 valve opened
9/11/2011	10:50:44 PM	BCl3 valve opened
9/11/2011	10:50:44 PM	SiCl4 pre valve opened
9/11/2011	10:50:44 PM	SiCl4 post valve opened
9/11/2011	10:50:44 PM	Bubbler valve opened
9/11/2011	10:50:44 PM	Helium MFC set to  0.000000
9/11/2011	10:50:44 PM	H2 MFC set to  500.000000
9/11/2011	10:50:44 PM	BCl3 MFC set to  2.500000
9/11/2011	10:50:44 PM	PHl3 MFC set to  0.000000
9/11/2011	10:50:44 PM	SiCl4 MFC set to  50.000000
9/11/2011	10:50:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	10:50:44 PM	Tube furnace set to 1000
9/11/2011	11:04:44 PM	Helium valve closed
9/11/2011	11:04:44 PM	BCl3 valve closed
9/11/2011	11:04:44 PM	PH3 valve closed
9/11/2011	11:04:44 PM	SiCl4 pre valve closed
9/11/2011	11:04:44 PM	SiCl4 post valve closed
9/11/2011	11:04:44 PM	Main Vac valve closed
9/11/2011	11:04:44 PM	Bypass valve closed
9/11/2011	11:04:44 PM	H2 valve opened
9/11/2011	11:04:44 PM	Bubbler valve opened
9/11/2011	11:04:44 PM	Helium MFC set to  0.000000
9/11/2011	11:04:44 PM	H2 MFC set to  500.000000
9/11/2011	11:04:44 PM	BCl3 MFC set to  0.000000
9/11/2011	11:04:44 PM	PHl3 MFC set to  0.000000
9/11/2011	11:04:44 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:04:44 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:04:45 PM	Tube furnace set to 975
9/11/2011	11:06:15 PM	Helium valve closed
9/11/2011	11:06:15 PM	BCl3 valve closed
9/11/2011	11:06:15 PM	PH3 valve closed
9/11/2011	11:06:15 PM	SiCl4 pre valve closed
9/11/2011	11:06:15 PM	SiCl4 post valve closed
9/11/2011	11:06:15 PM	Main Vac valve closed
9/11/2011	11:06:15 PM	Bypass valve closed
9/11/2011	11:06:15 PM	H2 valve opened
9/11/2011	11:06:15 PM	Bubbler valve opened
9/11/2011	11:06:15 PM	Helium MFC set to  0.000000
9/11/2011	11:06:15 PM	H2 MFC set to  500.000000
9/11/2011	11:06:15 PM	BCl3 MFC set to  0.000000
9/11/2011	11:06:15 PM	PHl3 MFC set to  0.000000
9/11/2011	11:06:15 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:06:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:06:15 PM	Tube furnace set to 950
9/11/2011	11:07:45 PM	Helium valve closed
9/11/2011	11:07:45 PM	BCl3 valve closed
9/11/2011	11:07:45 PM	PH3 valve closed
9/11/2011	11:07:45 PM	SiCl4 pre valve closed
9/11/2011	11:07:45 PM	SiCl4 post valve closed
9/11/2011	11:07:45 PM	Main Vac valve closed
9/11/2011	11:07:45 PM	Bypass valve closed
9/11/2011	11:07:45 PM	H2 valve opened
9/11/2011	11:07:45 PM	Bubbler valve opened
9/11/2011	11:07:45 PM	Helium MFC set to  0.000000
9/11/2011	11:07:45 PM	H2 MFC set to  500.000000
9/11/2011	11:07:45 PM	BCl3 MFC set to  0.000000
9/11/2011	11:07:45 PM	PHl3 MFC set to  0.000000
9/11/2011	11:07:45 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:07:45 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:07:45 PM	Tube furnace set to 925
9/11/2011	11:09:15 PM	Helium valve closed
9/11/2011	11:09:15 PM	BCl3 valve closed
9/11/2011	11:09:15 PM	PH3 valve closed
9/11/2011	11:09:15 PM	SiCl4 pre valve closed
9/11/2011	11:09:15 PM	SiCl4 post valve closed
9/11/2011	11:09:15 PM	Main Vac valve closed
9/11/2011	11:09:15 PM	Bypass valve closed
9/11/2011	11:09:15 PM	H2 valve opened
9/11/2011	11:09:15 PM	Bubbler valve opened
9/11/2011	11:09:15 PM	Helium MFC set to  0.000000
9/11/2011	11:09:15 PM	H2 MFC set to  500.000000
9/11/2011	11:09:15 PM	BCl3 MFC set to  0.000000
9/11/2011	11:09:15 PM	PHl3 MFC set to  0.000000
9/11/2011	11:09:15 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:09:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:09:15 PM	Tube furnace set to 900
9/11/2011	11:10:45 PM	H2 valve closed
9/11/2011	11:10:45 PM	BCl3 valve closed
9/11/2011	11:10:45 PM	PH3 valve closed
9/11/2011	11:10:45 PM	SiCl4 pre valve closed
9/11/2011	11:10:45 PM	SiCl4 post valve closed
9/11/2011	11:10:45 PM	Main Vac valve closed
9/11/2011	11:10:45 PM	Bypass valve closed
9/11/2011	11:10:45 PM	Helium valve opened
9/11/2011	11:10:45 PM	Bubbler valve opened
9/11/2011	11:10:45 PM	Helium MFC set to  500.000000
9/11/2011	11:10:45 PM	H2 MFC set to  0.000000
9/11/2011	11:10:45 PM	BCl3 MFC set to  0.000000
9/11/2011	11:10:45 PM	PHl3 MFC set to  0.000000
9/11/2011	11:10:45 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:10:45 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:10:45 PM	Tube furnace set to 875
9/11/2011	11:12:15 PM	H2 valve closed
9/11/2011	11:12:15 PM	BCl3 valve closed
9/11/2011	11:12:15 PM	PH3 valve closed
9/11/2011	11:12:15 PM	SiCl4 pre valve closed
9/11/2011	11:12:15 PM	SiCl4 post valve closed
9/11/2011	11:12:15 PM	Main Vac valve closed
9/11/2011	11:12:15 PM	Bypass valve closed
9/11/2011	11:12:15 PM	Helium valve opened
9/11/2011	11:12:15 PM	Bubbler valve opened
9/11/2011	11:12:15 PM	Helium MFC set to  500.000000
9/11/2011	11:12:15 PM	H2 MFC set to  0.000000
9/11/2011	11:12:15 PM	BCl3 MFC set to  0.000000
9/11/2011	11:12:15 PM	PHl3 MFC set to  0.000000
9/11/2011	11:12:15 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:12:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:12:16 PM	Tube furnace set to 850
9/11/2011	11:13:46 PM	H2 valve closed
9/11/2011	11:13:46 PM	BCl3 valve closed
9/11/2011	11:13:46 PM	PH3 valve closed
9/11/2011	11:13:46 PM	SiCl4 pre valve closed
9/11/2011	11:13:46 PM	SiCl4 post valve closed
9/11/2011	11:13:46 PM	Main Vac valve closed
9/11/2011	11:13:46 PM	Bypass valve closed
9/11/2011	11:13:46 PM	Helium valve opened
9/11/2011	11:13:46 PM	Bubbler valve opened
9/11/2011	11:13:46 PM	Helium MFC set to  500.000000
9/11/2011	11:13:46 PM	H2 MFC set to  0.000000
9/11/2011	11:13:46 PM	BCl3 MFC set to  0.000000
9/11/2011	11:13:46 PM	PHl3 MFC set to  0.000000
9/11/2011	11:13:46 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:13:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:13:46 PM	Tube furnace set to 825
9/11/2011	11:15:16 PM	H2 valve closed
9/11/2011	11:15:16 PM	BCl3 valve closed
9/11/2011	11:15:16 PM	PH3 valve closed
9/11/2011	11:15:16 PM	SiCl4 pre valve closed
9/11/2011	11:15:16 PM	SiCl4 post valve closed
9/11/2011	11:15:16 PM	Main Vac valve closed
9/11/2011	11:15:16 PM	Bypass valve closed
9/11/2011	11:15:16 PM	Helium valve opened
9/11/2011	11:15:16 PM	Bubbler valve opened
9/11/2011	11:15:16 PM	Helium MFC set to  500.000000
9/11/2011	11:15:16 PM	H2 MFC set to  0.000000
9/11/2011	11:15:16 PM	BCl3 MFC set to  0.000000
9/11/2011	11:15:16 PM	PHl3 MFC set to  0.000000
9/11/2011	11:15:16 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:15:16 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:15:16 PM	Tube furnace set to 800
9/11/2011	11:16:46 PM	H2 valve closed
9/11/2011	11:16:46 PM	BCl3 valve closed
9/11/2011	11:16:46 PM	PH3 valve closed
9/11/2011	11:16:46 PM	SiCl4 pre valve closed
9/11/2011	11:16:46 PM	SiCl4 post valve closed
9/11/2011	11:16:46 PM	Main Vac valve closed
9/11/2011	11:16:46 PM	Bypass valve closed
9/11/2011	11:16:46 PM	Helium valve opened
9/11/2011	11:16:46 PM	Bubbler valve opened
9/11/2011	11:16:46 PM	Helium MFC set to  500.000000
9/11/2011	11:16:46 PM	H2 MFC set to  0.000000
9/11/2011	11:16:46 PM	BCl3 MFC set to  0.000000
9/11/2011	11:16:46 PM	PHl3 MFC set to  0.000000
9/11/2011	11:16:46 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:16:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:16:46 PM	Tube furnace set to 0
9/11/2011	11:31:46 PM	Helium valve closed
9/11/2011	11:31:46 PM	H2 valve closed
9/11/2011	11:31:46 PM	BCl3 valve closed
9/11/2011	11:31:46 PM	PH3 valve closed
9/11/2011	11:31:46 PM	SiCl4 pre valve closed
9/11/2011	11:31:46 PM	SiCl4 post valve closed
9/11/2011	11:31:46 PM	Main Vac valve closed
9/11/2011	11:31:46 PM	Bypass valve closed
9/11/2011	11:31:46 PM	Bubbler valve closed
9/11/2011	11:31:46 PM	Helium MFC set to  0.000000
9/11/2011	11:31:46 PM	H2 MFC set to  0.000000
9/11/2011	11:31:46 PM	BCl3 MFC set to  0.000000
9/11/2011	11:31:46 PM	PHl3 MFC set to  0.000000
9/11/2011	11:31:46 PM	SiCl4 MFC set to  0.000000
9/11/2011	11:31:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2011	11:31:46 PM	Tube furnace set to 0
